Invention Grant
- Patent Title: Positive photoresist composition, via-forming method, display substrate and display device
-
Application No.: US16300474Application Date: 2018-04-25
-
Publication No.: US11526077B2Publication Date: 2022-12-13
- Inventor: Wei Li , Tongshang Su , Guangyao Li , Yingbin Hu , Rui Ma , Jifeng Shao , Yang Zhang , Jianye Zhang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing; CN Anhui
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing; CN Anhui
- Agency: Armstrong Teasdale LLP
- Priority: CNCN201710651692.X 20170802
- International Application: PCT/CN2018/084484 WO 20180425
- International Announcement: WO2019/024547 WO 20190207
- Main IPC: G03F7/022
- IPC: G03F7/022 ; G03F7/039 ; H01L27/12 ; G03F7/26 ; G03F7/031 ; G03F7/16 ; G03F7/20 ; H01L21/027 ; G03F7/085 ; G03F7/40 ; H01L21/311 ; G02F1/1362

Abstract:
The present disclosure provides a positive photoresist composition including a major adhesive material and a photosensitizer, wherein the photoresist composition further includes a photoisomerizable compound which would be converted into an ionic structure with an increased degree of molecular polarity after ultraviolet irradiation. The formation of the ionic structure with increased polarity of the molecule reduces the adhesion between the positive photoresist and the organic film layer, facilitates stripping after formation of the via, and improves the product rate of pass. Further, the present disclosure provides a via-forming method using the positive resist composition, a display substrate including the via formed by the via-forming method, and a display device including the display substrate.
Public/Granted literature
- US20200225582A9 POSITIVE PHOTORESIST COMPOSITION, VIA-FORMING METHOD, DISPLAY SUBSTRATE AND DISPLAY DEVICE Public/Granted day:2020-07-16
Information query
IPC分类: