Invention Grant
- Patent Title: Integrated assemblies having vertically-spaced channel material segments, and methods of forming integrated assemblies
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Application No.: US17393664Application Date: 2021-08-04
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Publication No.: US11557608B2Publication Date: 2023-01-17
- Inventor: Byeung Chul Kim , Francois H. Fabreguette , Richard J. Hill , Shyam Surthi
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L29/51 ; H01L29/49 ; H01L21/28 ; H01L29/792 ; H01L21/02 ; H01L29/788

Abstract:
Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions and include second regions proximate to the control gate regions. High-k dielectric structures are directly against the control gate regions and extend entirely across the insulative levels. Charge-blocking material is adjacent to the high-k dielectric structures. Charge-storage material is adjacent to the charge-blocking material. The charge-storage material is configured as segments which are vertically stacked one atop another, and which are vertically spaced from one another. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies, and methods of forming integrated assemblies.
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