Invention Grant
- Patent Title: Droplet ejecting apparatus having carriage marks, droplet ejecting method, and computer storage medium
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Application No.: US15905977Application Date: 2018-02-27
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Publication No.: US11571706B2Publication Date: 2023-02-07
- Inventor: Fumihiro Miyazaki , Kazuhito Miyazaki , Norihide Sagara , Wataru Yoshitomi , Koutarou Onoue
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Venjuris, P.C.
- Priority: JPJP2017-042756 20170307
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B41J2/045 ; B41J25/00 ; H01L51/00 ; H01L21/68 ; B41J29/393 ; H04N1/00 ; B05C5/02 ; B05C13/00 ; B05C11/10 ; B05D1/26 ; B05B12/08

Abstract:
A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.
Public/Granted literature
- US20180257099A1 DROPLET EJECTING APPARATUS, DROPLET EJECTING METHOD, AND COMPUTER STORAGE MEDIUM Public/Granted day:2018-09-13
Information query
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