公开(公告)号：US20180257100A1

公开(公告)日：2018-09-13

申请号：US15904553

申请日：2018-02-26

Applicant: Tokyo Electron Limited

Inventor： Wataru Yoshitomi ,  Koutarou Onoue ,  Yasushi Kuranaga ,  Kazuki Tashima

IPC: B05C11/00 ,  B05D1/26 ,  B05C13/00

CPC classification number: B05C11/00 ,  B05C5/02 ,  B05C11/1021 ,  B05C13/00 ,  B05D1/26 ,  G01B11/002 ,  G01B11/14 ,  H01L51/0005

Abstract: Disclosed is a workpiece processing apparatus that performs a predetermined processing on a workpiece. The workpiece processing apparatus includes: a workpiece table configured to place the workpiece thereon; a processor configured to process the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the processor; a position measuring device configured to measure a position of the movement mechanism; a detector configured to detect a position of the workpiece placed on the workpiece table; and a corrector configured to calculate a positional correction amount of the workpiece table based on a measurement result of the position measuring device and a detection result of the detector.

公开(公告)号：US11571706B2

公开(公告)日：2023-02-07

申请号：US15905977

申请日：2018-02-27

Applicant: Tokyo Electron Limited

Inventor： Fumihiro Miyazaki ,  Kazuhito Miyazaki ,  Norihide Sagara ,  Wataru Yoshitomi ,  Koutarou Onoue

IPC: H01L21/67 ,  B41J2/045 ,  B41J25/00 ,  H01L51/00 ,  H01L21/68 ,  B41J29/393 ,  H04N1/00 ,  B05C5/02 ,  B05C13/00 ,  B05C11/10 ,  B05D1/26 ,  B05B12/08

Abstract: A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.

公开(公告)号：US11577269B2

公开(公告)日：2023-02-14

申请号：US15904553

申请日：2018-02-26

Applicant: Tokyo Electron Limited

Inventor： Wataru Yoshitomi ,  Koutarou Onoue ,  Yasushi Kuranaga ,  Kazuki Tashima

IPC: B05D1/26 ,  B05B12/08 ,  B05B12/12 ,  B41J11/42 ,  H01L23/544 ,  B05C11/00 ,  B05C11/10 ,  B41J11/46 ,  H05B33/10 ,  B41J25/00 ,  G03F9/00 ,  B05C5/02 ,  G01B11/00 ,  G01B11/14 ,  B05C13/00 ,  H01L51/00 ,  B41J29/393 ,  B41J2/045

Abstract: Disclosed is a workpiece processing apparatus that performs a predetermined processing on a workpiece. The workpiece processing apparatus includes: a workpiece table configured to place the workpiece thereon; a processor configured to process the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the processor; a position measuring device configured to measure a position of the movement mechanism; a detector configured to detect a position of the workpiece placed on the workpiece table; and a corrector configured to calculate a positional correction amount of the workpiece table based on a measurement result of the position measuring device and a detection result of the detector.

公开(公告)号：US20180257099A1

公开(公告)日：2018-09-13

申请号：US15905977

申请日：2018-02-27

Applicant: Tokyo Electron Limited

Inventor： Fumihiro Miyazaki ,  Kazuhito Miyazaki ,  Norihide Sagara ,  Wataru Yoshitomi ,  Koutarou Onoue

IPC: B05C5/02 ,  B05D1/26 ,  B05C11/00 ,  B05C13/00

CPC classification number: B05C5/0208 ,  B05C11/00 ,  B05C13/00 ,  B05D1/26 ,  H01L21/6715 ,  H01L21/67259 ,  H01L21/681

Abstract: A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.