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公开(公告)号：US11633969B2
公开(公告)日：2023-04-25
申请号：US15911539
申请日：2018-03-05
IPC分类号： B41J29/393 , H01L21/67 , B05C11/10 , B41J3/407 , H05B33/10 , B41J11/42 , B05B12/08 , H01L51/00 , B41J25/00 , B41J11/46 , B41J2/045 , B05C5/02 , B29C64/112
摘要： A control unit obtains a captured image of a reference workpiece by a second image capturing unit after a droplet ejected from a droplet ejecting head lands toward a reference mark formed on an upper surface of the reference workpiece, detects a positional deviation amount of a position of the reference mark and a landing position of the droplet based on the captured image, and calculates the correction amounts of the relative positions of a workpiece table and a droplet ejecting head based on the positional deviation amount.
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2.发明申请公开(公告)号：US20180257100A1
公开(公告)日：2018-09-13
申请号：US15904553
申请日：2018-02-26
CPC分类号： B05C11/00 , B05C5/02 , B05C11/1021 , B05C13/00 , B05D1/26 , G01B11/002 , G01B11/14 , H01L51/0005
摘要： Disclosed is a workpiece processing apparatus that performs a predetermined processing on a workpiece. The workpiece processing apparatus includes: a workpiece table configured to place the workpiece thereon; a processor configured to process the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the processor; a position measuring device configured to measure a position of the movement mechanism; a detector configured to detect a position of the workpiece placed on the workpiece table; and a corrector configured to calculate a positional correction amount of the workpiece table based on a measurement result of the position measuring device and a detection result of the detector.
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公开(公告)号：US11577269B2
公开(公告)日：2023-02-14
申请号：US15904553
申请日：2018-02-26
IPC分类号： B05D1/26 , B05B12/08 , B05B12/12 , B41J11/42 , H01L23/544 , B05C11/00 , B05C11/10 , B41J11/46 , H05B33/10 , B41J25/00 , G03F9/00 , B05C5/02 , G01B11/00 , G01B11/14 , B05C13/00 , H01L51/00 , B41J29/393 , B41J2/045
摘要： Disclosed is a workpiece processing apparatus that performs a predetermined processing on a workpiece. The workpiece processing apparatus includes: a workpiece table configured to place the workpiece thereon; a processor configured to process the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the processor; a position measuring device configured to measure a position of the movement mechanism; a detector configured to detect a position of the workpiece placed on the workpiece table; and a corrector configured to calculate a positional correction amount of the workpiece table based on a measurement result of the position measuring device and a detection result of the detector.
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公开(公告)号：US20180257099A1
公开(公告)日：2018-09-13
申请号：US15905977
申请日：2018-02-27
CPC分类号： B05C5/0208 , B05C11/00 , B05C13/00 , B05D1/26 , H01L21/6715 , H01L21/67259 , H01L21/681
摘要： A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.
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公开(公告)号：US11623237B2
公开(公告)日：2023-04-11
申请号：US15911375
申请日：2018-03-05
IPC分类号： B05C11/00 , B05D1/26 , B41J11/00 , B05C5/02 , G01B11/00 , B41J11/06 , B41J11/42 , H01L27/12 , B41J29/393 , H01L21/67 , B41J11/46 , B05C11/10 , B05B12/08 , B41J2/045 , G06T3/40 , B29C64/393 , B05C13/00 , H01J9/02 , H01L51/00 , B41J25/00 , B41J11/20
摘要： Disclosed is droplet ejecting apparatus that ejects droplets of a functional liquid onto a workpiece to draw a pattern. The droplet ejecting apparatus includes: a workpiece table; a droplet ejecting head configured to eject the droplets onto the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the droplet ejecting head in a main scanning direction and a sub-scanning direction; and a control unit configured to: detect a position of the workpiece or a position of the workpiece table while relatively moving the workpiece table and the droplet ejecting head along a plurality of scanning lines extending in the main scanning direction and set side by side in the sub-scanning direction; and create, based on a detection result, a correction table that indicates a correlation between a position of the movement mechanism and a positional correction amount of the workpiece table.
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公开(公告)号：US11571706B2
公开(公告)日：2023-02-07
申请号：US15905977
申请日：2018-02-27
IPC分类号： H01L21/67 , B41J2/045 , B41J25/00 , H01L51/00 , H01L21/68 , B41J29/393 , H04N1/00 , B05C5/02 , B05C13/00 , B05C11/10 , B05D1/26 , B05B12/08
摘要： A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.
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