Invention Grant
- Patent Title: Heterojunction bipolar transistor with buried trap rich isolation region
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Application No.: US17074891Application Date: 2020-10-20
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Publication No.: US11721719B2Publication Date: 2023-08-08
- Inventor: Vibhor Jain , Anthony K. Stamper , John J. Ellis-Monaghan , Steven M. Shank , Rajendran Krishnasamy
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US NY Malta
- Agency: Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/08 ; H01L29/66 ; H01L29/737 ; H01L21/763 ; H01L29/165

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a trap rich isolation region embedded within the bulk substrate; and a heterojunction bipolar transistor above the trap rich isolation region, with its sub-collector region separated by the trap rich isolation region by a layer of the bulk substrate.
Public/Granted literature
- US20220123107A1 HETEROJUNCTION BIPOLAR TRANSISTOR WITH BURIED TRAP RICH ISOLATION REGION Public/Granted day:2022-04-21
Information query
IPC分类: