公开(公告)号：US12230673B2

公开(公告)日：2025-02-18

申请号：US17708561

申请日：2022-03-30

Applicant: GlobalFoundries U.S. Inc.

Inventor： Michel Abou-Khalil ,  Steven M. Shank ,  Aaron Vallett ,  Sarah McTaggart ,  Rajendran Krishnasamy

IPC: H01L29/06 ,  H01L29/10 ,  H01L29/423

Abstract: Semiconductor structures including electrical isolation and methods of forming a semiconductor structure including electrical isolation. The structure includes a semiconductor substrate having a first surface, a recess in the first surface, and a second surface inside the first recess. The structure further includes a shallow trench isolation region extending from the first surface into the semiconductor substrate. The shallow trench isolation region is positioned to surround an active device region including the recess. A field-effect transistor includes a gate electrode positioned on a portion of the second surface.

公开(公告)号：US12191300B2

公开(公告)日：2025-01-07

申请号：US17662921

申请日：2022-05-11

Applicant: GlobalFoundries U.S. Inc.

Inventor： Robert J. Gauthier, Jr. ,  Rajendran Krishnasamy ,  Anupam Dutta ,  Anindya Nath ,  Xiangxiang Lu ,  Satyasuresh Vvss Choppalli ,  Lin Lin

IPC: H01L27/02

Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure with resistive semiconductor material for a back well. The IC structure may include a semiconductor substrate having a deep well, and a device within a first portion of the deep well. The device includes a first doped semiconductor material coupled to a first contact, and a second doped semiconductor material coupled to a second contact. The deep well couples the first doped semiconductor material to the second doped semiconductor material. A first back well is within a second portion of the deep well. A first resistive semiconductor material is within the deep well and defines a boundary between the first portion of the deep well and the second portion of the deep well.

公开(公告)号：US20240204764A1

公开(公告)日：2024-06-20

申请号：US18065768

申请日：2022-12-14

Applicant: GlobalFoundries U.S. Inc.

Inventor： Santosh Sharma ,  Johnatan Avraham Kantarovsky ,  Rajendran Krishnasamy

IPC: H03K17/08 ,  H01L29/40 ,  H01L29/78

CPC classification number: H03K17/08 ,  H01L29/404 ,  H01L29/7816

Abstract: An integrated circuit (IC) having a high voltage semiconductor device with a plurality of field plates between the gate and drain. The IC further includes a biasing circuit electrically coupled to each of the plurality of field plates, the biasing circuit including a plurality of high voltage depletion mode transistors, each having a pinch off voltage. The high voltage depletion mode transistors may have different pinch off voltages, and each of the field plates are each independently biased by a different one of the high voltage depletion mode transistors.

公开(公告)号：US20220181361A1

公开(公告)日：2022-06-09

申请号：US17113418

申请日：2020-12-07

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： John J. Ellis-Monaghan ,  Steven M. Shank ,  Rajendran Krishnasamy ,  Ramsey Hazbun

IPC: H01L27/144 ,  H01L31/028 ,  H01L31/0312 ,  H01L31/103 ,  H01L31/18

Abstract: Structures including multiple photodiodes and methods of fabricating a structure including multiple photodiodes. A substrate has a first trench extending to a first depth into the substrate and a second trench extending to a second depth into the substrate that is greater than the first depth. A first photodiode includes a first light-absorbing layer containing a first material positioned in the first trench. A second photodiode includes a second light-absorbing layer containing a second material positioned in the second trench. The first material and the second material each include germanium.

公开(公告)号：US11316019B2

公开(公告)日：2022-04-26

申请号：US16942734

申请日：2020-07-29

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Johnatan Avraham Kantarovsky ,  Rajendran Krishnasamy ,  Siva P. Adusumilli ,  Steven Bentley ,  Michael Joseph Zierak ,  Jeonghyun Hwang

IPC: H01L29/40 ,  H01L29/778 ,  H01L29/66 ,  H01L29/423 ,  H01L29/78

Abstract: The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to semiconductor devices having field plates that are arranged symmetrically around a gate. The present disclosure provides a semiconductor device including an active region above a substrate, source and drain electrodes in contact with the active region, a gate above the active region and laterally between the source and drain electrodes, a first field plate between the source electrode and the gate, a second field plate between the drain electrode and the gate, in which the gate is spaced apart laterally and substantially equidistant from the first field plate and the second field plate.

公开(公告)号：US12237407B2

公开(公告)日：2025-02-25

申请号：US17978633

申请日：2022-11-01

Applicant: GlobalFoundries U.S. Inc.

Inventor： Anupam Dutta ,  Rajendran Krishnasamy ,  Vvss Satyasuresh Choppalli ,  Vibhor Jain ,  Robert J. Gauthier, Jr.

IPC: H01L29/737

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a heterojunction bipolar transistor comprising a collector region, a base region and an emitter region; and at least one non-single-crystal semiconductor region in the collector region of the heterojunction bipolar transistor.

公开(公告)号：US20240234533A1

公开(公告)日：2024-07-11

申请号：US18152710

申请日：2023-01-10

Applicant: GlobalFoundries U.S. Inc.

Inventor： Santosh Sharma ,  Shesh Mani Pandey ,  Rajendran Krishnasamy

IPC: H01L29/47 ,  H01L29/40 ,  H01L29/66 ,  H01L29/778

CPC classification number: H01L29/475 ,  H01L29/401 ,  H01L29/66462 ,  H01L29/7786

Abstract: Disclosed is a structure including a substrate and a transistor on the substrate. The transistor includes a barrier layer above the substrate and a multi-gate structure on the barrier layer. The multi-gate structure includes a primary gate and a secondary gate. The secondary gate has opposing sidewalls, opposing end walls and a top surface. The primary gate includes essentially vertically-oriented first portions on the barrier layer positioned laterally adjacent to opposing sidewalls, respectively, of the secondary gate. Optionally, the primary gate also includes an essentially horizontally-oriented second portion on the top surface of the secondary gate and/or essentially vertically-oriented third portions on the opposing end walls, respectively. The secondary gate can be a floating gate. Also disclosed is a method of forming the structure.

公开(公告)号：US20240234409A1

公开(公告)日：2024-07-11

申请号：US18152420

申请日：2023-01-10

Applicant: GlobalFoundries U.S. Inc.

Inventor： Sagar Premnath Karalkar ,  Ephrem G. Gebreselasie ,  Rajendran Krishnasamy ,  Robert J. Gauthier, JR. ,  Souvick Mitra

IPC: H01L27/02

CPC classification number: H01L27/0262

Abstract: The disclosure provides a structure including an n-type well over an n-type deep well and between a pair of p-type wells for electrostatic discharge (ESD) protection. The structure may include a p-type deep well over a substrate, a first n-type well over the p-type deep well, and a pair of p-type wells over the p-type deep well. The pair of p-type wells are each adjacent opposite horizontal ends of the n-type well. A pair of second n-type wells are over the p-type deep well and adjacent one of the pair of p-type wells. Each p-type well is horizontally between the first n-type well and one of the second n-type wells.

公开(公告)号：US11972999B2

公开(公告)日：2024-04-30

申请号：US17643023

申请日：2021-12-07

Applicant: GlobalFoundries U.S. Inc.

Inventor： Mark D. Levy ,  Rajendran Krishnasamy ,  Michael J. Zierak ,  Siva P. Adusumilli

IPC: H01L23/367 ,  H01L23/373 ,  H01L29/417 ,  H01L29/732

CPC classification number: H01L23/367 ,  H01L23/3736 ,  H01L29/41708 ,  H01L29/7325

Abstract: A structure includes an electrical device, and an active contact landed on a portion of the electrical device. The active contact includes a first body of a first material. A thermal dissipation pillar is adjacent the active contact and unlanded on but over the portion of the electrical device. The thermal dissipation pillar includes a second body of a second material having a higher thermal conductivity than the first material. The thermal dissipation pillar may be in thermal communication with a wire in a dielectric layer over the active contact and the thermal dissipation pillar. The electrical device can be any integrated circuit device that generates heat.

公开(公告)号：US20240105683A1

公开(公告)日：2024-03-28

申请号：US17955225

申请日：2022-09-28

Applicant: GlobalFoundries U.S. Inc.

Inventor： Vvss Satyasuresh Choppalli ,  Anupam Dutta ,  Rajendran Krishnasamy ,  Robert Gauthier, JR. ,  Xiang Xiang Lu ,  Anindya Nath

IPC: H01L25/07 ,  H01L21/77 ,  H01L23/14 ,  H01L23/522

CPC classification number: H01L25/072 ,  H01L21/77 ,  H01L23/147 ,  H01L23/5228

Abstract: Structures including multiple semiconductor devices and methods of forming same. The structure comprises a first device structure including a first well and a second well in a semiconductor substrate, a second device structure including a doped region in the semiconductor substrate, and a first high-resistivity region in the semiconductor substrate. The first well has a first conductivity type, the second well has a second conductivity type opposite to the first conductivity type, and the first well adjoins the second well to define a p-n junction. The doped region of the second device structure has the first conductivity type or the second conductivity type. The high-resistivity region has a higher electrical resistivity than the semiconductor substrate, and the high-resistivity region is positioned between the first device structure and the second device structure.