Invention Grant
- Patent Title: 3D stackable memory and methods of manufacture
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Application No.: US18343912Application Date: 2023-06-29
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Publication No.: US11991888B2Publication Date: 2024-05-21
- Inventor: Meng-Han Lin , Chih-Yu Chang , Han-Jong Chia , Sai-Hooi Yeong , Yu-Ming Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H10B63/00
- IPC: H10B63/00 ; H01L21/02 ; H01L21/822 ; H01L21/8234 ; H01L27/06 ; H01L29/06 ; H01L29/24 ; H01L29/423 ; H01L29/66 ; H01L29/786 ; H01L29/861 ; H10B43/20 ; H10N70/00 ; H10B43/35 ; H10N70/20

Abstract:
Memory devices and methods of forming the memory devices are disclosed herein. The memory devices include a resistive memory array including a first resistive memory cell, a staircase contact structure adjacent the resistive memory array, and an inter-metal dielectric layer over the staircase contact structure. The memory devices further include a first diode and a second diode over the inter-metal dielectric layer. The memory devices further include a first conductive via electrically coupling the first diode to a first resistor of the first resistive memory cell and a second conductive via electrically coupling the second diode to a second resistor of the first resistive memory cell.
Public/Granted literature
- US20230345741A1 3D Stackable Memory and Methods of Manufacture Public/Granted day:2023-10-26
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