Invention Grant
- Patent Title: Colored gratings in microelectronic structures
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Application No.: US17124730Application Date: 2020-12-17
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Publication No.: US12087594B2Publication Date: 2024-09-10
- Inventor: Gurpreet Singh , Eungnak Han , Manish Chandhok , Richard E Schenker , Florian Gstrein , Paul A. Nyhus , Charles Henry Wallace
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Akona IP PC
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/768

Abstract:
Disclosed herein are colored gratings in microelectronic structures. For example, a microelectronic structure may include first conductive structures alternating with second conductive structures, wherein individual ones of the first conductive structures include a bottom portion and a top portion, individual cap structures are on individual ones of the second conductive structures, the bottom portions of the first conductive structures are laterally spaced apart from and aligned with the second conductive structures, and the top portions of the first conductive structures are laterally spaced apart from and aligned with the cap structures. In some embodiments, a microelectronic structure may include one or more unordered lamellar regions laterally spaced apart from and aligned with the first conductive structures.
Public/Granted literature
- US20220199420A1 COLORED GRATINGS IN MICROELECTRONIC STRUCTURES Public/Granted day:2022-06-23
Information query
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