Invention Grant
- Patent Title: Composition for chemical-mechanical polishing and chemical-mechanical polishing method
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Application No.: US17775887Application Date: 2020-10-12
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Publication No.: US12104087B2Publication Date: 2024-10-01
- Inventor: Yuuya Yamada , Pengyu Wang , Norihiko Sugie , Yasutaka Kamei
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JP 19206905 2019.11.15
- International Application: PCT/JP2020/038480 2020.10.12
- International Announcement: WO2021/095414A 2021.05.20
- Date entered country: 2022-05-11
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C09K3/14 ; C09K13/00 ; H01L21/321 ; H01L21/768

Abstract:
Provided are a chemical-mechanical polishing composition and a chemical-mechanical polishing method capable of polishing a semiconductor substrate containing a conductive metal such as tungsten or cobalt flatly and at high speed as well as reducing surface defects after polishing. The composition for chemical-mechanical polishing contains (A) silica particles having a functional group represented by general formula (1) and (B) a silane compound. —COO-M+ . . . (1) (M+ represents a monovalent cation.)
Public/Granted literature
- US20220389279A1 COMPOSITION FOR CHEMICAL-MECHANICAL POLISHING AND CHEMICAL-MECHANICAL POLISHING METHOD Public/Granted day:2022-12-08
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