Invention Grant
- Patent Title: Stacked FETS with non-shared work function metals
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Application No.: US17545610Application Date: 2021-12-08
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Publication No.: US12278237B2Publication Date: 2025-04-15
- Inventor: Ruilong Xie , Julien Frougier , Junli Wang , Dechao Guo , Ruqiang Bao , Rishikesh Krishnan , Balasubramanian S. Pranatharthiharan
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Samuel Waldbaum
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/02 ; H01L21/28 ; H01L21/822 ; H01L21/8238 ; H01L23/528 ; H01L29/06 ; H01L29/417 ; H01L29/423 ; H01L29/49 ; H01L29/66 ; H01L29/786

Abstract:
A semiconductor structure is provided that includes a first FET device stacked over a second FET device, wherein the first FET device contains a first functional gate structure containing a first work function metal and the second FET device contains a second functional gate structure containing a second work function metal. In the structure, the first work function metal is absent from an area including the second work function metal, and vice versa. Thus, no shared work functional metal is present in the semiconductor structure.
Public/Granted literature
- US20230178553A1 STACKED FETS WITH NON-SHARED WORK FUNCTION METALS Public/Granted day:2023-06-08
Information query
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