Invention Application
- Patent Title: Semiconductor device with high-k gate dielectric
- Patent Title (中): 具有高k栅极电介质的半导体器件
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Application No.: US10832020Application Date: 2004-04-26
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Publication No.: US20050035345A1Publication Date: 2005-02-17
- Inventor: Chun-Chieh Lin , Wen-Chin Lee , Chenming Hu , Shang-Chih Chen , Chih-Hao Wang , Fu-Liang Yang , Yee-Chia Yeo
- Applicant: Chun-Chieh Lin , Wen-Chin Lee , Chenming Hu , Shang-Chih Chen , Chih-Hao Wang , Fu-Liang Yang , Yee-Chia Yeo
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L21/8234 ; H01L29/51 ; H01L29/06

Abstract:
An integrated circuit includes a substrate, a first transistor, and a second transistor. The first transistor has a first gate dielectric portion located between a first gate electrode and the substrate. The first gate dielectric portion includes a first high-permittivity dielectric material and/or a second high-permittivity dielectric material. The first gate dielectric portion has a first equivalent silicon oxide thickness. The second transistor has a second gate dielectric portion located between a second gate electrode and the substrate. The second gate dielectric portion includes the first high-permittivity dielectric material and/or the second high-permittivity dielectric material. The second gate dielectric portion has a second equivalent silicon oxide thickness. The second equivalent silicon oxide thickness may be different than the first equivalent silicon oxide thickness.
Public/Granted literature
- US07045847B2 Semiconductor device with high-k gate dielectric Public/Granted day:2006-05-16
Information query
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