Invention Application
- Patent Title: Bicine/tricine containing composition and method for chemical-mechanical planarization
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Application No.: US10683233Application Date: 2003-10-10
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Publication No.: US20050076579A1Publication Date: 2005-04-14
- Inventor: Junaid Siddiqui , Timothy Compton , Bin Hu , Robin Richards , Saifi Usmani
- Applicant: Junaid Siddiqui , Timothy Compton , Bin Hu , Robin Richards , Saifi Usmani
- Main IPC: B24B37/00
- IPC: B24B37/00 ; C09G1/02 ; C09K3/14 ; H01L21/304 ; H01L21/321 ; B24D3/02 ; H01L21/302 ; H01L21/461

Abstract:
A composition and associated method for chemical mechanical planarization (or other polishing) are described. The composition comprises an abrasive and a tricine-type or bicine-type compound. The composition possesses high selectivities for removal of copper in relation to tantalum and dielectric materials whilst minimizing local dishing and erosion effects in CMP. The composition may further comprise an oxidizing agent in which case the composition is particularly useful in conjunction with the associated method for metal CMP applications (e.g., copper CMP).
Information query