CMP composition of boron surface-modified abrasive and nitro-substituted sulfonic acid and method of use
    4.
    发明申请
    CMP composition of boron surface-modified abrasive and nitro-substituted sulfonic acid and method of use 失效
    硼表面改性磨料和硝基取代磺酸的CMP组成及其使用方法

    公开(公告)号:US20070054495A1

    公开(公告)日:2007-03-08

    申请号:US11509223

    申请日:2006-08-24

    CPC classification number: H01L21/3212 C09G1/02 H01L21/31053

    Abstract: A composition and associated method for chemical mechanical planarization (or other polishing) are described. The composition contains a boron surface-modified abrasive, a nitro-substituted sulfonic acid compound, a per-compound oxidizing agent, and water. The composition affords high removal rates for barrier layer materials in metal CMP processes. The composition is particularly useful in conjunction with the associated method for metal CMP applications (e.g., step 2 copper CMP processes).

    Abstract translation: 描述了用于化学机械平面化(或其它抛光)的组合物和相关方法。 该组合物含有硼表面改性的研磨剂,硝基取代的磺酸化合物,每一种化合物的氧化剂和水。 该组合物在金属CMP工艺中为阻挡层材料提供高的去除率。 该组合物特别适用于金属CMP应用的相关方法(例如,步骤2铜CMP工艺)。

    Low-dishing composition and method for chemical-mechanical planarization with branched-alkylphenol-substituted benzotriazole
    5.
    发明申请
    Low-dishing composition and method for chemical-mechanical planarization with branched-alkylphenol-substituted benzotriazole 审中-公开
    具有支链烷基酚取代苯并三唑的化学机械平面化的低磨损组成和方法

    公开(公告)号:US20060213868A1

    公开(公告)日:2006-09-28

    申请号:US11374714

    申请日:2006-03-14

    CPC classification number: H01L21/3212 C09G1/02 C09K3/1463

    Abstract: A composition and associated method for chemical mechanical planarization (or other polishing) are described. The composition comprises a branched-alkylphenol-substituted-benzotriazole. The composition affords low dishing, high metal removal rates, and high selectivities for removal of copper in relation to barrier layer materials and dielectric materials whilst minimizing local erosion effects in CMP. The composition may further comprise an oxidizing agent in which case the composition is particularly useful in conjunction with the associated method for metal CMP applications (e.g., copper CMP). The composition may also further comprise an isothiazoline compound to synergistically impart lower dishing levels during CMP processing.

    Abstract translation: 描述了用于化学机械平面化(或其它抛光)的组合物和相关方法。 该组合物包含支链烷基苯酚取代的苯并三唑。 该组合物提供了相对于阻挡层材料和电介质材料的低凹陷,高金属去除速率和用于去除铜的高选择性,同时最小化CMP中的局部侵蚀效应。 组合物还可以包含氧化剂,在这种情况下,组合物特别适用于金属CMP应用的相关方法(例如,铜CMP)。 该组合物还可以包含异噻唑啉化合物,以协同地赋予CMP处理期间更低的凹陷度。

    Composition and associated methods for chemical mechanical planarization having high selectivity for metal removal
    7.
    发明申请
    Composition and associated methods for chemical mechanical planarization having high selectivity for metal removal 有权
    用于金属去除的高选择性的化学机械平面化的组成和相关方法

    公开(公告)号:US20050044803A1

    公开(公告)日:2005-03-03

    申请号:US10914113

    申请日:2004-08-09

    CPC classification number: H01L21/3212 C09K3/1409 C09K3/1463 Y10T428/259

    Abstract: A composition and associated methods for chemical mechanical planarization (or other polishing) are described. The composition may comprise an abrasive and a dispersed hybrid organic/inorganic particle. The composition may further comprise an alkyne compound. Two different methods for chemical mechanical planarization are disclosed. In one method (Method A), the CMP slurry composition employed in the method comprises comprise an abrasive and a dispersed hybrid organic/inorganic particle. In another method (Method B), the CMP slurry composition employed in the method comprises comprise an abrasive and an alkyne compound. The composition may further comprise an oxidizing agent in which case the composition is particularly useful in conjunction with the associated methods (A and B) for metal CMP applications (e.g., tungsten CMP).

    Abstract translation: 描述了用于化学机械平面化(或其它抛光)的组合物和相关方法。 组合物可以包含研磨剂和分散的杂化有机/无机颗粒。 组合物还可以包含炔化合物。 公开了用于化学机械平面化的两种不同的方法。 在一种方法(方法A)中,该方法中使用的CMP浆料组合物包括研磨剂和分散的杂化有机/无机颗粒。 在另一种方法(方法B)中,该方法中使用的CMP浆料组合物包括研磨剂和炔化合物。 组合物还可以包含氧化剂,在这种情况下,组合物特别适用于金属CMP应用(例如,钨CMP)的相关方法(A和B)。

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