发明申请
US20050194622A1 Nonvolatile capacitor of a semiconductor device, semiconductor memory device including the capacitor, and method of operating the same
审中-公开
半导体器件的非易失性电容器,包括该电容器的半导体存储器件及其操作方法
- 专利标题: Nonvolatile capacitor of a semiconductor device, semiconductor memory device including the capacitor, and method of operating the same
- 专利标题(中): 半导体器件的非易失性电容器,包括该电容器的半导体存储器件及其操作方法
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申请号: US11013923申请日: 2004-12-17
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公开(公告)号: US20050194622A1公开(公告)日: 2005-09-08
- 发明人: Jung-hyun Lee , Sung-ho Park , Myoung-jae Lee , Young-soo Park
- 申请人: Jung-hyun Lee , Sung-ho Park , Myoung-jae Lee , Young-soo Park
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR2003-92614 20031217
- 主分类号: H01L27/10
- IPC分类号: H01L27/10 ; G11C16/02 ; H01L21/02 ; H01L21/8242 ; H01L21/8246 ; H01L27/115 ; H01L27/22 ; H01L29/92 ; H01L45/00 ; H01L49/02 ; H01L21/20 ; H01L27/108 ; H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119
摘要:
In a capacitor of a semiconductor device, a semiconductor memory device including the capacitor, and a method of operating the semiconductor memory device, the capacitor includes a lower electrode, a dielectric layer stacked on the lower electrode, the dielectric layer including a phase-transition layer capable of exhibiting two different resistance characteristics depending on whether an insulating property thereof has been changed, and an upper electrode stacked on the dielectric layer.
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