Method of forming carbon fibers using metal-organic chemical vapor deposition
    6.
    发明授权
    Method of forming carbon fibers using metal-organic chemical vapor deposition 有权
    使用金属有机化学气相沉积法形成碳纤维的方法

    公开(公告)号:US07691441B2

    公开(公告)日:2010-04-06

    申请号:US11550121

    申请日:2006-10-17

    IPC分类号: C23C16/00

    摘要: A method of forming carbon fibers at a low temperature below 450° C. using an organic-metal evaporation method is provided. The method includes: heating a substrate and maintaining the substrate at a temperature of 200 to 450° C. after loading the substrate into a reaction chamber; preparing an organic-metal compound containing Ni; forming an organic-metal compound vapor by vaporizing the organic-metal compound; and forming carbon fibers on the substrate by facilitating a chemical reaction between the organic-metal compound vapor and a reaction gas containing ozone in the reaction chamber.

    摘要翻译: 提供了使用有机金属蒸发法在低于450℃的低温下形成碳纤维的方法。 该方法包括:将基板加载到反应室中之后,加热基板并将基板保持在200至450℃的温度; 制备含有Ni的有机金属化合物; 通过蒸发有机金属化合物形成有机金属化合物蒸气; 以及通过促进有机金属化合物蒸气和在反应室中含有臭氧的反应气体之间的化学反应,在基板上形成碳纤维。

    Capacitor having a dielectric layer that reduces leakage current and a method of manufacturing the same
    9.
    发明授权
    Capacitor having a dielectric layer that reduces leakage current and a method of manufacturing the same 有权
    具有减小漏电流的电介质层的电容器及其制造方法

    公开(公告)号:US07352022B2

    公开(公告)日:2008-04-01

    申请号:US11207740

    申请日:2005-08-22

    IPC分类号: H01L27/108

    CPC分类号: H01L28/65 H01L28/40

    摘要: A capacitor having a dielectric layer including a composite oxide, the composite oxide including a transition metal and including a lanthanide group element, a memory device including the same and a method of manufacturing the capacitor are provided. The transition metal may be titanium and the composite oxide may be nitrided. The method may include providing a precursor of a transition metal, providing a precursor of a lanthanide group element, and forming a composite oxide on the lower electrode by oxidizing both the precursor of the transition metal and the precursor of the lanthanide group element, the composite oxide containing the transition metal and the lanthanide group element.

    摘要翻译: 提供具有包括复合氧化物的电介质层的电容器,包含过渡金属并且包括镧系元素元素的复合氧化物,包括其的存储装置和制造电容器的方法。 过渡金属可以是钛,并且复合氧化物可以被氮化。 该方法可以包括提供过渡金属的前体,提供镧系元素元素的前体,以及通过氧化过渡金属的前体和镧系元素前体的复合氧化物,形成复合氧化物,复合材料 含有过渡金属和镧系元素的氧化物。