发明申请
- 专利标题： Method and device for the plasma treatment of workpieces
- 专利标题（中）： 用于等离子体处理工件的方法和装置
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申请号： US10515609申请日： 2003-05-09
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公开(公告)号： US20050227002A1公开(公告)日： 2005-10-13
- 发明人: Michael Lizenberg , Frank Lewi , Hartwig Muller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Luttringhaus-Henkel , Matthias Bicker , Jurgen Klein
- 申请人： Michael Lizenberg , Frank Lewi , Hartwig Muller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Luttringhaus-Henkel , Matthias Bicker , Jurgen Klein
- 优先权： DE10223288.1 20020524; DE10225985.2 20020611
- 国际申请： PCT/DE03/01506 WO 20030509
- 主分类号： A61L2/14
- IPC分类号： A61L2/14 ; B01J19/08 ; B05D7/24 ; B08B7/00 ; B08B9/42 ; B29C49/42 ; B65D23/02 ; B65G29/00 ; C03C17/00 ; C23C14/04 ; C23C14/50 ; C23C16/04 ; C23C16/40 ; C23C16/44 ; C23C16/458 ; C23C16/511 ; C23C16/54 ; C23C16/00 ; B05D7/22
摘要：
The invention relates to a method and a device which are used for the plasma treatment of work pieces. Said work piece is inserted into an at least partially evacuatable chamber of a treatment station (3) and the work piece is positioned inside the treatment station of retaining elements. At least one operating agent is at least partially impinged upon by a transporting device (44) which is displaced together with the treatment station on a closed arid rotating transport path.
公开/授权文献
- US07699933B2 Method and device for the plasma treatment of workpieces 公开/授权日：2010-04-20
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