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公开(公告)号：US20050227002A1
公开(公告)日：2005-10-13
申请号：US10515609
申请日：2003-05-09
申请人： Michael Lizenberg , Frank Lewi , Hartwig Muller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Luttringhaus-Henkel , Matthias Bicker , Jurgen Klein
发明人： Michael Lizenberg , Frank Lewi , Hartwig Muller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Luttringhaus-Henkel , Matthias Bicker , Jurgen Klein
IPC分类号： A61L2/14 , B01J19/08 , B05D7/24 , B08B7/00 , B08B9/42 , B29C49/42 , B65D23/02 , B65G29/00 , C03C17/00 , C23C14/04 , C23C14/50 , C23C16/04 , C23C16/40 , C23C16/44 , C23C16/458 , C23C16/511 , C23C16/54 , C23C16/00 , B05D7/22
CPC分类号： C23C16/54 , B05D1/62 , B08B7/00 , B08B9/426 , B29C49/421 , B29C2049/4221 , B29C2791/001 , B65D23/02 , B65G29/00 , B65G2201/0244 , C23C14/046 , C23C14/505 , C23C16/045 , C23C16/401 , C23C16/458 , C23C16/511 , H01J37/32733
摘要： The invention relates to a method and a device which are used for the plasma treatment of work pieces. Said work piece is inserted into an at least partially evacuatable chamber of a treatment station (3) and the work piece is positioned inside the treatment station of retaining elements. At least one operating agent is at least partially impinged upon by a transporting device (44) which is displaced together with the treatment station on a closed arid rotating transport path.
摘要翻译： 本发明涉及一种用于等离子体处理工件的方法和装置。 所述工件被插入到处理站（3）的至少部分可抽空的室中，并且工件位于保持元件的处理站内。 至少一个操作剂至少部分地被传送装置（44）撞击，传送装置（44）与处理站一起在封闭的和转动的传送路径上移动。
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公开(公告)号：US20060086320A1
公开(公告)日：2006-04-27
申请号：US10515606
申请日：2003-05-09
申请人： Michael Lizenberg , Frank Lewin , Hartwig Muller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Luttringhaus-Henkel , Matthias Bicker , Jurgen Klein
发明人： Michael Lizenberg , Frank Lewin , Hartwig Muller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Luttringhaus-Henkel , Matthias Bicker , Jurgen Klein
CPC分类号： C23C16/4409 , B05D1/62 , B08B7/00 , B08B9/426 , B29C49/421 , B29C2049/4221 , B29C2791/001 , B65D23/02 , B65G29/00 , B65G2201/0244 , C08J9/0004 , C08J2300/14 , C23C14/046 , C23C14/505 , C23C14/56 , C23C16/045 , C23C16/401 , C23C16/455 , C23C16/458 , C23C16/50 , C23C16/511 , C23C16/54 , H01J37/32733
摘要： Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (4) of a treatment station (17), which can be at least partly evacuated, and at least one part (18) of the treatment station is moved relative to another part (27, 35) thereof in order to help manipulate the workpieces. The movement is carried out in such a way that a shell-shaped chamber wall (18) is positioned relative to a floor (35) of the chamber and relative to a chamber lid (27).
摘要翻译： 公开了一种等离子体处理工件（5）的方法和装置。 所述工件插入处理台（17）的腔室（4）中，所述腔室可以被至少部分抽真空，并且处理站的至少一个部分（18）相对于其另一部分（27,35）移动 以帮助操纵工件。 该运动以这样的方式进行，使得壳形室壁（18）相对于室的底板（35）相对于室盖（27）定位。
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公开(公告)号：US20050229850A1
公开(公告)日：2005-10-20
申请号：US10514880
申请日：2003-05-26
IPC分类号： B05D7/24 , B08B7/00 , B29C49/42 , B65D23/02 , C03C17/00 , C08J9/00 , C23C16/04 , C23C16/40 , C23C16/44 , C23C16/458 , C23C16/511 , C23C16/54 , C23C16/00
CPC分类号： C23C16/54 , B05D1/62 , B08B7/00 , B29C49/421 , B29C2049/4221 , B29C2791/001 , B65D23/02 , B65G2201/0244 , C03C17/004 , C08J9/0004 , C08J2300/14 , C23C16/045 , C23C16/401 , C23C16/4412 , C23C16/458 , C23C16/511 , H01J37/32733
摘要： A method and apparatus are provided for allowing effective and fast CVD coating of workpieces. The invention provides a rotary apparatus for treatment, in particular CVD-coating, which includes a conveyor carousel, treatment stations, which are transported by the conveyor carousel, and at least one first pump device. The first pump device is transported by the conveyor carousel.
摘要翻译： 提供了一种方法和装置，用于允许工件的有效和快速的CVD涂覆。 本发明提供了一种用于处理，特别是CVD涂覆的旋转设备，其包括传送带传送带，由输送机转盘传送的处理站以及至少一个第一泵装置。 第一个泵装置由输送机转盘运送。
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公开(公告)号：US20070148368A1
公开(公告)日：2007-06-28
申请号：US11527110
申请日：2006-09-25
CPC分类号： H01L21/67745 , C23C16/045 , C23C16/509 , C23C16/54 , H01J37/32733
摘要： In order to allow a continuous production process for the plasma treatment of workpieces, an apparatus for plasma treatment of workpieces is provided which comprises a transport device and a plasma generating device which injects electromagnetic energy into an area of the apparatus during operation, in which the transport device carries the workpieces through the area continuously.
摘要翻译： 为了允许用于工件的等离子体处理的连续制造工艺，提供了一种用于工件的等离子体处理的装置，其包括输送装置和等离子体产生装置，其在操作期间将电磁能注入到装置的区域中，其中 运输装置通过该区域连续运送工件。
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公开(公告)号：US20050118428A1
公开(公告)日：2005-06-02
申请号：US10637779
申请日：2003-08-07
IPC分类号： B05D7/00 , B05D7/02 , B05D7/24 , C23C16/02 , C23C16/04 , C23C16/30 , C23C16/40 , C23C16/515 , C23C28/00 , B32B9/00 , C23C16/00 , H05H1/24
CPC分类号： B05D7/50 , B05D1/60 , B05D1/62 , B05D7/02 , C23C16/0272 , C23C16/045 , C23C16/30 , C23C16/401 , C23C16/515 , Y10T428/31504 , Y10T428/31681
摘要： The invention describes a process for applying alternating layers by chemical vapor deposition which comprises the process steps of depositing an adhesion-promoter layer on a substrate and of applying a barrier layer, alternating layers comprising organic and inorganic materials being deposited alternately, in which process the coating time for application of the adhesion-promoter layer is between 0.05 s and 4.0 s and the coating time for application of the inorganic barrier layer is between 0.1 s and 6.0 s, and also a composite material produced using the process.
摘要翻译： 本发明描述了一种通过化学气相沉积施加交替层的方法，其包括在衬底上沉积粘合促进剂层和施加阻挡层的方法步骤，交替层包含交替沉积的有机和无机材料，在该过程中 粘合促进剂层的涂布时间为0.05s〜4.0s，涂布无机阻挡层的涂布时间为0.1s〜6.0s，也是使用该方法制造的复合材料。
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公开(公告)号：US20050051088A1
公开(公告)日：2005-03-10
申请号：US10892530
申请日：2004-07-15
CPC分类号： F16L39/04 , C23C16/045 , C23C16/54
摘要： The invention relates to an apparatus for coating hollow bodies, e.g. plastic drinks bottles. It is an object of the invention to provide an apparatus for treating workpieces which operates reliably and with low maintenance, can be flexibly adapted to the user's requirements or to the requirements of the desired process sequence, and which allows efficient evacuation. The apparatus according to the invention comprises at least one treatment device (101) for receiving at least one workpiece, a rotor on which the treatment device is arranged, a fluid rotary leadthrough for feeding at least one fluid onto the rotor and/or for discharging at least one fluid from the rotor, the fluid rotary leadthrough having a journal and a sleeve, which at least in sections are sealed off from one another, and the journal being arranged rotatably in the sleeve. The proposed radial arrangement is particularly unsusceptible to faults and entails little maintenance.
摘要翻译： 本发明涉及一种用于涂覆中空体的设备，例如， 塑料饮料瓶。 本发明的一个目的是提供一种用于处理可靠且维护性低的工件的装置，可以灵活地适应用户的要求或符合所需工艺顺序的要求，并且允许有效的撤离。 根据本发明的装置包括至少一个用于接收至少一个工件的处理装置（101），设置有处理装置的转子，用于将至少一种流体供给到转子和/或用于排出的流体旋转引导件 至少一个来自所述转子的流体，所述流体旋转引导件具有轴颈和套筒，所述轴颈至少部分彼此密封，并且所述轴颈可旋转地布置在所述套筒中。 所提出的径向布置对于故障特别不能察觉，并且不需要维护。
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公开(公告)号：US07926446B2
公开(公告)日：2011-04-19
申请号：US10515084
申请日：2003-05-26
申请人： Stephan Behle , Andreas Luttringhaus-Henkel , Gregor Arnold , Mathias Bicker , Marten Walther , Juergen Klein
发明人： Stephan Behle , Andreas Luttringhaus-Henkel , Gregor Arnold , Mathias Bicker , Marten Walther , Juergen Klein
IPC分类号： C23C16/511 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： C23C16/4409 , B05D1/62 , B08B7/00 , B08B9/426 , B29C49/421 , B29C2049/4221 , B29C2791/001 , B65D23/02 , B65G29/00 , B65G2201/0244 , C03C17/005 , C08J9/0004 , C08J2300/14 , C23C14/046 , C23C14/505 , C23C14/56 , C23C16/045 , C23C16/401 , C23C16/4412 , C23C16/455 , C23C16/458 , C23C16/50 , C23C16/511 , C23C16/54 , H01J37/32733
摘要： A coating apparatus is provided for simplifying the introduction and removal of workpieces into and from a reactor for plasma coating and to increase the throughput. The coating apparatus has a reactor with a moveable sleeve part and a base element, at least one sealed coating chamber being defined between sleeve part and base element when the latter two parts are fitted onto one another. The coating apparatus also has a device for introducing electromagnetic energy into the at least one coating chamber. The reactor has at least two coating places.
摘要翻译： 提供了一种涂布装置，用于简化进入和离开用于等离子体涂覆的反应器的工件的引入和移除并提高生产量。 涂覆装置具有具有可移动套筒部分和基部元件的反应器，当后两个部件彼此装配时，至少一个密封涂覆室限定在套筒部分和基部元件之间。 该涂覆装置还具有用于将电磁能引入到至少一个涂覆室中的装置。 反应器至少有两个涂层位置。
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公开(公告)号：US20060201420A1
公开(公告)日：2006-09-14
申请号：US11417967
申请日：2006-05-04
IPC分类号： B05B13/06
CPC分类号： F16L39/04 , C23C16/045 , C23C16/54
摘要： The invention relates to a fluid rotary leadthrough having a journal and a sleeve. The sleeve and the journal are sealed off with respect to one another. The journal and the sleeve each have a line connection. The line connections, at least from time to time, are connected to one another via a fluid passage so that a flow of fluid through the fluid rotary leadthrough is made possible. The journal is arranged rotatably in the sleeve.
摘要翻译： 本发明涉及具有轴颈和套筒的流体旋转引导件。 袖子和杂志相对于彼此密封。 日志和袖子都有一条线路连接。 至少有时线路连接通过流体通道相互连接，使流体通过流体旋转引线的流动成为可能。 轴颈可旋转地布置在套筒中。
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公开(公告)号：US20050223988A1
公开(公告)日：2005-10-13
申请号：US10515038
申请日：2003-05-26
IPC分类号： B05D3/00 , B05D7/24 , B08B7/00 , B29C49/42 , B65D23/02 , C03C17/00 , C08J9/00 , C23C14/04 , C23C14/50 , C23C14/56 , C23C16/04 , C23C16/40 , C23C16/44 , C23C16/458 , C23C16/511 , C23C16/54 , C23C16/00
CPC分类号： C23C16/54 , B05D1/62 , B08B7/00 , B29C49/421 , B29C2049/4221 , B29C2791/001 , B65D23/02 , B65G2201/0244 , C08J9/0004 , C08J2300/14 , C23C14/046 , C23C14/505 , C23C14/56 , C23C16/045 , C23C16/401 , C23C16/458 , C23C16/511 , H01J37/32733
摘要： An apparatus and method for a vacuum coating of substrates is provided. The apparatus for vacuum coating of substrates includes a conveyor device, at least one coating station having a plurality of coating places, which is conveyed on the conveyor device, an evacuation device, as well as a device for rotating the coating places on the conveyor device.
摘要翻译： 提供了一种用于基板真空涂覆的装置和方法。 用于真空涂覆基材的装置包括输送装置，至少一个具有多个涂布位置的涂布台，该输送装置在输送装置上输送，抽真空装置以及用于旋转输送装置上的涂布部位的装置 。
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