Invention Application
- Patent Title: Rapidly Cleanable Electroplating Cup Assembly
- Patent Title (中): 快速清洁电镀杯组装
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Application No.: US11932595Application Date: 2007-10-31
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Publication No.: US20090107835A1Publication Date: 2009-04-30
- Inventor: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
- Applicant: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
- Applicant Address: US CA San Jose
- Assignee: NOVELLUS SYSTEMS, INC.
- Current Assignee: NOVELLUS SYSTEMS, INC.
- Current Assignee Address: US CA San Jose
- Main IPC: C25B9/00
- IPC: C25B9/00

Abstract:
Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
Public/Granted literature
- US07935231B2 Rapidly cleanable electroplating cup assembly Public/Granted day:2011-05-03
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