发明申请
- 专利标题: IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 图像传感器及其制造方法
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申请号: US12266856申请日: 2008-11-07
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公开(公告)号: US20090206432A1公开(公告)日: 2009-08-20
- 发明人: Hong-Ki KIM , Duck-Hyung LEE , Hyun-Pil NOH
- 申请人: Hong-Ki KIM , Duck-Hyung LEE , Hyun-Pil NOH
- 优先权: KR2008-14038 20080215
- 主分类号: H01L31/09
- IPC分类号: H01L31/09 ; H01L21/311 ; H01L31/0232
摘要:
An image sensor and a method of manufacturing the same are provided. The image sensor includes a substrate having a sensor array area and a peripheral circuit area a first insulating film structure formed on the peripheral circuit area and including a plurality of first multi-layer wiring lines and a second insulating film structure formed on the sensor array area and including a plurality of second multi-layer wiring lines. The uppermost-layer wiring line of the plurality of first multi-layer wiring lines is higher than that of the uppermost-layer wiring line of the plurality of second multi-layer wiring lines. The first insulating film structure includes an isotropic etch-stop layer, and the second insulating film structure does not include the isotropic etch-stop layer.
公开/授权文献
- US08154097B2 Image sensor and method of manufacturing the same 公开/授权日:2012-04-10
信息查询
IPC分类: