发明申请
US20120193792A1 SEMICONDUCTOR DEVICE CONDUCTIVE PATTERN STRUCTURES INCLUDING DUMMY CONDUCTIVE PATTERNS, AND METHODS OF MANUFACTURING THE SAME 有权
半导体器件导电图案结构,包括导电图案及其制造方法

SEMICONDUCTOR DEVICE CONDUCTIVE PATTERN STRUCTURES INCLUDING DUMMY CONDUCTIVE PATTERNS, AND METHODS OF MANUFACTURING THE SAME
摘要:
Methods of forming conductive pattern structures form an insulating interlayer on a substrate that is partially etched to form a first trench extending to both end portions of a cell block. The insulating interlayer is also partially etched to form a second trench adjacent to the first trench, and a third trench extending to the both end portions of the cell block. The second trench has a disconnected shape at a middle portion of the cell block. A seed copper layer is formed on the insulating interlayer. Inner portions of the first, second and third trenches are electroplated with a copper layer. The copper layer is polished to expose the insulating interlayer to form first and second conductive patterns in the first and second trenches, respectively, and a first dummy conductive pattern in the third trench. Related conductive pattern structures are also described.
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