发明申请
- 专利标题： METHOD AND APPARATUS OF GROWING A THIN FILM
- 专利标题（中）： 生长薄膜的方法和装置
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申请号： US13845621申请日： 2013-03-18
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公开(公告)号： US20130247823A1公开(公告)日： 2013-09-26
- 发明人: Jau-Chyn Huang , Kong-Wei Cheng , Wen-Sheng Chang , Tai-Chou Lee , Ching-Chen Wu
- 申请人： INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 优先权： TW95148509 20061222
- 主分类号： B05C3/05
- IPC分类号： B05C3/05
摘要：
A method and apparatus of growing a thin film are provided. The method comprises at least (a) providing a number of substrates; (b) cleaning the substrates; and (c) placing the substrates into a reaction liquid; (d) vibrating the reaction liquid by ultrasonic waves such that a thin film is grown on the substrates evenly.
公开/授权文献
- US09221071B2 Method and apparatus of growing a thin film 公开/授权日：2015-12-29
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