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公开(公告)号：US09221071B2
公开(公告)日：2015-12-29
申请号：US13845621
申请日：2013-03-18
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Jau-Chyn Huang , Kong-Wei Cheng , Wen-Sheng Chang , Tai-Chou Lee , Ching-Chen Wu
CPC classification number: B05C3/05 , C23C18/14 , H01L21/02568 , H01L21/02628 , H01L31/18
Abstract: A method and apparatus of growing a thin film are provided. The method comprises at least (a) providing a number of substrates; (b) cleaning the substrates; and (c) placing the substrates into a reaction liquid; (d) vibrating the reaction liquid by ultrasonic waves such that a thin film is grown on the substrates evenly.
Abstract translation: 提供了生长薄膜的方法和装置。 该方法至少包括（a）提供多个基底; （b）清洁基材; 和（c）将基材置于反应液中; （d）通过超声波使反应液振动，使得在基板上均匀地生长薄膜。
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公开(公告)号：US09109807B2
公开(公告)日：2015-08-18
申请号：US13720922
申请日：2012-12-19
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Ming-Shiann Shih , Jau-Chyn Huang
IPC: F24F3/14
CPC classification number: F24F3/14 , F24F3/1411
Abstract: The present invention provides a device and system for desorption and dehumidification, comprising a conductive electrode, a moisture absorber, and a power source. The conductive electrode comprises a first surface and a second surface opposite to the first surface, and the first surface has a plurality of protrusion elements. The moisture absorber comprises a third surface formed on the plurality of protrusions. The power source provides power to the conductive electrode such that a uniform and stable micro-discharge phenomenon is generated thereby forming a continuous charge flow. The continuous charge flow can further generate an electrical interruption for depolarizing the attraction between the moisture molecules and moisture absorber whereby the moisture molecules can be desorbed from the moisture absorber more easily.
Abstract translation: 本发明提供了一种用于解吸和除湿的装置和系统，包括导电电极，吸湿剂和电源。 导电电极包括与第一表面相对的第一表面和第二表面，并且第一表面具有多个突起元件。 吸湿剂包括形成在多个突起上的第三表面。 电源为导电电极提供电力，从而产生均匀且稳定的微放电现象，从而形成连续的充电流。 连续充电流可以进一步产生电中断，用于使水分分子和吸湿剂之间的吸引物去极化，从而更容易地将水分子从吸湿吸收剂中解吸。
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公开(公告)号：US09180400B2
公开(公告)日：2015-11-10
申请号：US13668018
申请日：2012-11-02
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Ming-Shiann Shih , Jau-Chyn Huang
CPC classification number: B01D53/261 , B01D53/0438 , B01D53/06 , B01D53/28 , B01D2253/106 , B01D2257/80 , B01D2259/40083 , B01D2259/4009 , B01D2259/40096 , B01D2259/4508 , B01J20/02 , B01J20/06 , B01J20/10 , B01J20/18 , B01J20/20 , B01J20/3433 , B01J20/3441 , B01J2220/42
Abstract: An electrified desorption device, including a conductive water-absorbing material containing titanosilicates, wherein a ratio of silicon atoms to titanium atoms in the titanosilicates of the conductive water-absorbing material is 1 ≤ Si Ti ≤ 10 ; a conductive layer selected from the group consisting of a metal component, an alloy material, a conductive oxide component, and a mixture including either (a) more than one of the foregoing components or (b) the metal component, the alloy material, and graphite, attached to end surfaces at two sides of the water-absorbing material; a pair of electrode structures, coupled to two sides of the water-absorbing material respectively, and each having multiple sub-electrodes insulated from each other; and a voltage source, coupled to the pair of electrode structures.
Abstract translation: 一种电化解吸装置，包括含有钛硅酸盐的导电性吸水材料，其中导电性吸水材料的钛硅酸盐中的硅原子与钛原子的比例为1≤SiTi≤10; 选自金属组分，合金材料，导电氧化物组分和包含（a）多于一种前述组分的混合物的导电层，或（b）金属组分，合金材料和 石墨，附着在吸水材料两侧的端面; 一对电极结构，分别耦合到吸水材料的两侧，并且各自具有彼此绝缘的多个子电极; 以及耦合到所述一对电极结构的电压源。
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公开(公告)号：US20130247823A1
公开(公告)日：2013-09-26
申请号：US13845621
申请日：2013-03-18
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Jau-Chyn Huang , Kong-Wei Cheng , Wen-Sheng Chang , Tai-Chou Lee , Ching-Chen Wu
IPC: B05C3/05
CPC classification number: B05C3/05 , C23C18/14 , H01L21/02568 , H01L21/02628 , H01L31/18
Abstract: A method and apparatus of growing a thin film are provided. The method comprises at least (a) providing a number of substrates; (b) cleaning the substrates; and (c) placing the substrates into a reaction liquid; (d) vibrating the reaction liquid by ultrasonic waves such that a thin film is grown on the substrates evenly.
Abstract translation: 提供了生长薄膜的方法和装置。 该方法至少包括（a）提供多个基底; （b）清洁基材; 和（c）将基材置于反应液中; （d）通过超声波使反应液振动，使得在基板上均匀地生长薄膜。
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