Invention Application
US20160118577A1 PERPENDICULAR MAGNETIC RANDOM-ACCESS MEMORY (MRAM) FORMATION BY DIRECT SELF-ASSEMBLY METHOD
审中-公开
通过直接自组装方法形成的全磁性随机存取存储器(MRAM)
- Patent Title: PERPENDICULAR MAGNETIC RANDOM-ACCESS MEMORY (MRAM) FORMATION BY DIRECT SELF-ASSEMBLY METHOD
- Patent Title (中): 通过直接自组装方法形成的全磁性随机存取存储器(MRAM)
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Application No.: US14990911Application Date: 2016-01-08
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Publication No.: US20160118577A1Publication Date: 2016-04-28
- Inventor: Chih-Ming Chen , Chern-Yow Hsu , Szu-Yu Wang , Chung-Yi Yu , Chia-Shiung Tsai , Xiaomeng Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Main IPC: H01L43/08
- IPC: H01L43/08 ; H01L43/10 ; G11C11/16 ; H01L43/02 ; H01L27/22

Abstract:
Some embodiments of the present disclosure relate to a method that achieves a substantially uniform pattern of magnetic random access memory (MRAM) cells with a minimum dimension below the lower resolution limit of some optical lithography techniques. A copolymer solution comprising first and second polymer species is spin-coated over a heterostructure which resides over a surface of a substrate. The heterostructure comprises first and second ferromagnetic layers which are separated by an insulating layer. The copolymer solution is subjected to self-assembly into a phase-separated material comprising a pattern of micro-domains of the second polymer species within a polymer matrix comprising the first polymer species. The first polymer species is then removed, leaving a pattern of micro-domains of the second polymer species. A pattern of magnetic memory cells within the heterostructure is formed by etching through the heterostructure while utilizing the pattern of micro-domains as a hardmask.
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