- 专利标题: GIMBAL ASSEMBLY TEST SYSTEM AND METHOD
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申请号: US15014479申请日: 2016-02-03
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公开(公告)号: US20170219626A1公开(公告)日: 2017-08-03
- 发明人: David L. Gardell , David M. Audette , Peter W. Neff
- 申请人: GLOBALFOUNDRIES INC.
- 主分类号: G01R1/073
- IPC分类号: G01R1/073 ; G01R31/28 ; G01R35/00
摘要:
Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.
公开/授权文献
- US10041976B2 Gimbal assembly test system and method 公开/授权日:2018-08-07
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