公开(公告)号：US10041976B2

公开(公告)日：2018-08-07

申请号：US15014479

申请日：2016-02-03

Applicant: GLOBALFOUNDRIES INC.

Inventor： David L. Gardell ,  David M. Audette ,  Peter W. Neff

IPC: G01R1/073 ,  G01R33/00 ,  G01R35/00 ,  G01R31/24 ,  G01R31/44 ,  G01R31/26

Abstract: Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.

公开(公告)号：US20170219626A1

公开(公告)日：2017-08-03

申请号：US15014479

申请日：2016-02-03

Applicant: GLOBALFOUNDRIES INC.

Inventor： David L. Gardell ,  David M. Audette ,  Peter W. Neff

IPC: G01R1/073 ,  G01R31/28 ,  G01R35/00

CPC classification number: G01R1/07364 ,  G01R1/0735 ,  G01R31/24 ,  G01R31/2635 ,  G01R31/44 ,  G01R33/0017 ,  G01R35/005

Abstract: Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.

公开(公告)号：US10514393B2

公开(公告)日：2019-12-24

申请号：US15933443

申请日：2018-03-23

Applicant: GLOBALFOUNDRIES INC.

Inventor： David L. Gardell ,  David M. Audette ,  Peter W. Neff

IPC: G01R31/00 ,  G01R1/073 ,  G01R33/00 ,  G01R35/00 ,  G01R31/24 ,  G01R31/44 ,  G01R31/26 ,  H05B37/03

Abstract: Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.

公开(公告)号：US20180217184A1

公开(公告)日：2018-08-02

申请号：US15933443

申请日：2018-03-23

Applicant: GLOBALFOUNDRIES INC.

Inventor： David L. Gardell ,  David M. Audette ,  Peter W. Neff

IPC: G01R1/073 ,  G01R31/24 ,  G01R33/00 ,  G01R35/00 ,  G01R31/26 ,  G01R31/44

Abstract: Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.