Invention Application
- Patent Title: SWITCHABLE FILTERS AND DESIGN STRUCTURES
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Application No.: US15691272Application Date: 2017-08-30
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Publication No.: US20170366154A1Publication Date: 2017-12-21
- Inventor: James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Main IPC: H03H3/007
- IPC: H03H3/007 ; H03H9/56 ; G06F17/50 ; H03H3/02 ; H03H9/02 ; H03H9/24 ; H03H9/10 ; H03H9/64 ; H03H9/54 ; H03H3/08 ; H03H9/15

Abstract:
Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.
Public/Granted literature
- US10164597B2 Switchable filters and design structures Public/Granted day:2018-12-25
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