Invention Application
- Patent Title: MULTIPLE DEEP TRENCH ISOLATION (MDTI) STRUCTURE FOR CMOS IMAGE SENSOR
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Application No.: US15822701Application Date: 2017-11-27
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Publication No.: US20190165009A1Publication Date: 2019-05-30
- Inventor: Wei Chuang Wu , Ching-Chun Wang , Dun-Nian Yaung , Feng-Chi Hung , Jen-Cheng Liu , Yen-Ting Chiang , Chun-Yuan Chen , Shen-Hui Hong
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/369 ; H04N5/374

Abstract:
The present disclosure relates to a CMOS image sensor having a multiple deep trench isolation (MDTI) structure, and an associated method of formation. In some embodiments, a plurality of pixel regions is disposed within a substrate and respectively comprising a photodiode. A boundary deep trench isolation (BDTI) structure is disposed between adjacent pixel regions, extending from a back-side of the substrate to a first depth within the substrate, and surrounding the photodiode. A multiple deep trench isolation (MDTI) structure is disposed within the individual pixel region, extending from the back-side of the substrate to a second depth within the substrate, and overlying the photodiode. A dielectric layer fills in a BDTI trench of the BDTI structure and a MDTI trench of the MDTI structure.
Public/Granted literature
- US10461109B2 Multiple deep trench isolation (MDTI) structure for CMOS image sensor Public/Granted day:2019-10-29
Information query
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