Invention Application
- Patent Title: CAPACITORS
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Application No.: US16359292Application Date: 2019-03-20
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Publication No.: US20190214456A1Publication Date: 2019-07-11
- Inventor: Veeraraghavan S. BASKER , Kangguo CHENG , Christopher J. PENNY , Theodorus E. STANDAERT , Junli WANG
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L23/522 ; H01L21/768 ; H01L23/532 ; H01L23/528 ; H01L21/311

Abstract:
Back end of the line (BEOL) capacitors and methods of manufacture are provided. The method includes forming wiring lines on a substrate, with spacing between adjacent wiring lines. The method further includes forming an air gap within spacing between the adjacent wiring lines by deposition of a capping material. The method further includes opening the air gap between selected adjacent wiring lines. The method further includes depositing conductive material within the opened air gap.
Public/Granted literature
- US10833149B2 Capacitors Public/Granted day:2020-11-10
Information query
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