- 专利标题: Cobalt Filling of Interconnects
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申请号: US17222058申请日: 2021-04-05
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公开(公告)号: US20210332491A1公开(公告)日: 2021-10-28
- 发明人: John Commander , Kyle Whitten , Vincent Paneccasio, JR. , Shaopeng Sun , Eric Yakobson , Jianwen Han , Elie Najjar
- 申请人: MacDermid Enthone Inc.
- 申请人地址: US CT Waterbury
- 专利权人: MacDermid Enthone Inc.
- 当前专利权人: MacDermid Enthone Inc.
- 当前专利权人地址: US CT Waterbury
- 主分类号: C25D3/16
- IPC分类号: C25D3/16 ; H01L21/768 ; C25D5/02 ; C25D7/12 ; H01L21/288 ; C25D3/18 ; C25D7/00
摘要:
Compositions and methods of using such compositions for electroplating cobalt onto semiconductor base structures comprising submicron-sized electrical interconnect features are provided herein. The interconnect features are metallized by contacting the semiconductor base structure with an electrolytic composition comprising a source of cobalt ions, a suppressor, a buffer, and one or more of a depolarizing compound and a uniformity enhancer. Electrical current is supplied to the electrolytic composition to deposit cobalt onto the base structure and fill the submicron-sized features with cobalt. The method presented herein is useful for superfilling interconnect features.
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