Invention Application
- Patent Title: SPLIT GATE NON-VOLATILE MEMORY CELLS, HV AND LOGIC DEVICES WITH FINFET STRUCTURES, AND METHOD OF MAKING SAME
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Application No.: US17152441Application Date: 2021-01-19
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Publication No.: US20220139940A1Publication Date: 2022-05-05
- Inventor: Guo Xiang Song , CHUNMING WANG , LEO XING , XIAN LIU , NHAN DO
- Applicant: Silicon Storage Technology, Inc.
- Applicant Address: US CA San Jose
- Assignee: Silicon Storage Technology, Inc.
- Current Assignee: Silicon Storage Technology, Inc.
- Current Assignee Address: US CA San Jose
- Priority: CN202011193113.X 20201030
- Main IPC: H01L27/11531
- IPC: H01L27/11531 ; H01L27/11521 ; H01L29/423 ; H01L29/78 ; H01L29/788 ; H01L21/28 ; H01L29/66

Abstract:
A method of forming memory cells, high voltage devices and logic devices on fins of a semiconductor substrate's upper surface, and the resulting memory device formed thereby. The memory cells are formed on a pair of the fins, where the floating gate is disposed between the pair of fins, the word line gate wraps around the pair of fins, the control gate is disposed over the floating gate, and the erase gate is disposed over the pair of fins and partially over the floating gate. The high voltage devices include HV gates that wrap around respective fins, and the logic devices include logic gates that are metal and wrap around respective fins.
Information query
IPC分类: