公开(公告)号：US11316024B2

公开(公告)日：2022-04-26

申请号：US17165934

申请日：2021-02-02

Applicant: Silicon Storage Technology, Inc.

Inventor： Chunming Wang ,  Xian Liu ,  Guo Xiang Song ,  Leo Xing ,  Nhan Do

IPC: G11C11/34 ,  H01L29/423 ,  H01L29/788 ,  H01L29/66 ,  G11C16/04

Abstract: A memory device, and method of making the same, that includes a substrate of semiconductor material of a first conductivity type, first and second regions spaced apart in the substrate and having a second conductivity type different than the first conductivity type, with a first channel region in the substrate extending between the first and second regions, a first floating gate disposed over and insulated from a first portion of the first channel region adjacent to the second region, a first coupling gate disposed over and insulated from the first floating gate, a first word line gate disposed over and insulated from a second portion of the first channel region adjacent the first region, and a first erase gate disposed over and insulated from the first word line gate.

公开(公告)号：US20220093623A1

公开(公告)日：2022-03-24

申请号：US17151944

申请日：2021-01-19

Applicant: Silicon Storage Technology, Inc.

Inventor： Chunming Wang ,  Guo Xiang Song ,  Leo Xing ,  Jack Sun ,  Xian Liu ,  Nhan Do

IPC: H01L27/11531 ,  H01L27/11521 ,  H01L29/423 ,  H01L29/78 ,  H01L29/788 ,  H01L21/28 ,  H01L21/265 ,  H01L21/762 ,  H01L29/66

Abstract: A method of forming memory cells, HV devices and logic devices on a substrate, including recessing the upper surface of the memory cell and HV device areas of the substrate, forming a polysilicon layer in the memory cell and HV device areas, forming first trenches through the first polysilicon layer and into the silicon substrate in the memory cell and HV device areas, filling the first trenches with insulation material, forming second trenches into the substrate in the logic device area to form upwardly extending fins, removing portions of the polysilicon layer in the memory cell area to form floating gates, forming erase and word line gates in the memory cell area, HV gates in the HV device area, and dummy gates in the logic device area from a second polysilicon layer, and replacing the dummy gates with metal gates that wrap around the fins.

公开(公告)号：US11444091B2

公开(公告)日：2022-09-13

申请号：US17129865

申请日：2020-12-21

Applicant: Silicon Storage Technology, Inc.

Inventor： Jack Sun ,  Chunming Wang ,  Xian Liu ,  Andy Yang ,  Guo Xiang Song ,  Leo Xing ,  Nhan Do

IPC: H01L21/00 ,  H01L27/11531 ,  H01L27/11524 ,  H01L29/66 ,  H01L29/423 ,  H01L27/11529

Abstract: A method of forming a semiconductor device by recessing the upper surface of a semiconductor substrate in first and second areas but not a third area, forming a first conductive layer in the first and second areas, forming a second conductive layer in all three areas, removing the first and second conductive layers from the second area and portions thereof from the first area resulting in pairs of stack structures each with a control gate over a floating gate, forming a third conductive layer in the first and second areas, forming a protective layer in the first and second areas and then removing the second conductive layer from the third area, then forming blocks of conductive material in the third area, then etching in the first and second areas to form select and HV gates, and replacing the blocks of conductive material with blocks of metal material.

公开(公告)号：US11315635B2

公开(公告)日：2022-04-26

申请号：US17152696

申请日：2021-01-19

Applicant: Silicon Storage Technology, Inc.

Inventor： Chunming Wang ,  Xian Liu ,  Guo Xiang Song ,  Leo Xing ,  Nhan Do

IPC: G11C16/04 ,  G11C16/16 ,  H01L27/11556 ,  H01L27/11521 ,  H01L29/423

Abstract: A memory device includes a semiconductor substrate, first and second regions in the substrate having a conductivity type different than that of the substrate, with a channel region in the substrate extending between the first and second regions. The channel region is continuous between the first and second regions. A first floating gate is disposed over and insulated from a first portion of the channel region. A second floating gate is disposed over and insulated from a second portion of the channel region. A first coupling gate is disposed over and insulated from the first floating gate. A second coupling gate is disposed over and insulated from the second floating gate. A word line gate is disposed over and insulated from a third portion of the channel region between the first and second channel region portions. An erase gate is disposed over and insulated from the word line gate.

公开(公告)号：US11737266B2

公开(公告)日：2023-08-22

申请号：US17339880

申请日：2021-06-04

Applicant: Silicon Storage Technology, Inc.

Inventor： Guo Xiang Song ,  Chunming Wang ,  Leo Xing ,  Xian Liu ,  Nhan Do

IPC: H01L27/088 ,  H10B41/41

CPC classification number: H10B41/41

Abstract: A method of forming a semiconductor device by recessing the upper surface of a semiconductor substrate in first and second areas but not a third area, forming a first conductive layer in the three areas, forming a second conductive layer in all three areas, removing the first and second conductive layers from the second area and portions thereof from the first area resulting in pairs of stack structures each with a control gate over a floating gate, forming a third conductive layer in all three areas, forming a protective layer in the first and second areas and then removing the third conductive layer from the third area, then forming blocks of dummy conductive material in the third area, then etching in the first and second areas to form select and HV gates, and then replacing the blocks of dummy conductive material with blocks of metal material.

公开(公告)号：US20230189520A1

公开(公告)日：2023-06-15

申请号：US18103265

申请日：2023-01-30

Applicant: Silicon Storage Technology, Inc.

Inventor： Guo Xiang Song ,  Chunming Wang ,  Leo Xing ,  Xian Liu ,  Nhan Do

IPC: H10B41/42 ,  H01L21/28 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H10B41/30

CPC classification number: H10B41/42 ,  H01L29/40114 ,  H01L29/42328 ,  H01L29/66545 ,  H01L29/66795 ,  H01L29/66825 ,  H01L29/7851 ,  H01L29/7883 ,  H10B41/30

Abstract: A method of forming memory cells, high voltage devices and logic devices on fins of a semiconductor substrate's upper surface, and the resulting memory device formed thereby. The memory cells are formed on a pair of the fins, where the floating gate is disposed between the pair of fins, the word line gate wraps around the pair of fins, the control gate is disposed over the floating gate, and the erase gate is disposed over the pair of fins and partially over the floating gate. The high voltage devices include HV gates that wrap around respective fins, and the logic devices include logic gates that are metal and wrap around respective fins.

公开(公告)号：US20220139940A1

公开(公告)日：2022-05-05

申请号：US17152441

申请日：2021-01-19

Applicant: Silicon Storage Technology, Inc.

Inventor： Guo Xiang Song ,  CHUNMING WANG ,  LEO XING ,  XIAN LIU ,  NHAN DO

IPC: H01L27/11531 ,  H01L27/11521 ,  H01L29/423 ,  H01L29/78 ,  H01L29/788 ,  H01L21/28 ,  H01L29/66

Abstract: A method of forming memory cells, high voltage devices and logic devices on fins of a semiconductor substrate's upper surface, and the resulting memory device formed thereby. The memory cells are formed on a pair of the fins, where the floating gate is disposed between the pair of fins, the word line gate wraps around the pair of fins, the control gate is disposed over the floating gate, and the erase gate is disposed over the pair of fins and partially over the floating gate. The high voltage devices include HV gates that wrap around respective fins, and the logic devices include logic gates that are metal and wrap around respective fins.

公开(公告)号：US20220102517A1

公开(公告)日：2022-03-31

申请号：US17165934

申请日：2021-02-02

Applicant: Silicon Storage Technology, Inc.

Inventor： Chunming Wang ,  Xian Liu ,  Guo Xiang Song ,  Leo Xing ,  Nhan Do

IPC: H01L29/423 ,  G11C16/04 ,  H01L29/66 ,  H01L29/788

Abstract: A memory device, and method of making the same, that includes a substrate of semiconductor material of a first conductivity type, first and second regions spaced apart in the substrate and having a second conductivity type different than the first conductivity type, with a first channel region in the substrate extending between the first and second regions, a first floating gate disposed over and insulated from a first portion of the first channel region adjacent to the second region, a first coupling gate disposed over and insulated from the first floating gate, a first word line gate disposed over and insulated from a second portion of the first channel region adjacent the first region, and a first erase gate disposed over and insulated from the first word line gate.

公开(公告)号：US20210398995A1

公开(公告)日：2021-12-23

申请号：US17129865

申请日：2020-12-21

Applicant: Silicon Storage Technology, Inc.

Inventor： Jack Sun ,  Chunming Wang ,  Xian Liu ,  Andy Yang ,  Guo Xiang Song ,  Leo Xing ,  Nhan Do

IPC: H01L27/11531 ,  H01L27/11524 ,  H01L27/11529 ,  H01L29/423 ,  H01L29/66

Abstract: A method of forming a semiconductor device by recessing the upper surface of a semiconductor substrate in first and second areas but not a third area, forming a first conductive layer in the first and second areas, forming a second conductive layer in all three areas, removing the first and second conductive layers from the second area and portions thereof from the first area resulting in pairs of stack structures each with a control gate over a floating gate, forming a third conductive layer in the first and second areas, forming a protective layer in the first and second areas and then removing the second conductive layer from the third area, then forming blocks of conductive material in the third area, then etching in the first and second areas to form select and HV gates, and replacing the blocks of conductive material with blocks of metal material.

公开(公告)号：US11799005B2

公开(公告)日：2023-10-24

申请号：US17346524

申请日：2021-06-14

Applicant: Silicon Storage Technology, Inc.

Inventor： Leo Xing ,  Chunming Wang ,  Xian Liu ,  Nhan Do ,  Guo Xiang Song

IPC: H01L29/423 ,  H01L29/788 ,  H01L29/66 ,  H01L21/28

CPC classification number: H01L29/42328 ,  H01L29/40114 ,  H01L29/66825 ,  H01L29/7883

Abstract: A method of forming a memory device that includes forming a first insulation layer, a first conductive layer, and a second insulation layer on a semiconductor substrate, forming a trench in the second insulation layer to expose the upper surface of the first conductive layer, performing an oxidation process and a sloped etch process to reshape the upper surface to a concave shape, forming a third insulation layer on the reshaped upper surface, forming a conductive spacer on the third insulation layer, removing portions of the first conductive layer leaving a floating gate under the conductive spacer with the reshaped upper surface terminating at a side surface at a sharp edge, and forming a word line gate laterally adjacent to and insulated from the floating gate. The conductive spacer includes a lower surface that faces and matches the shape of the reshaped upper surface.