- 专利标题: THREE-DIMENSIONAL MEMORY DEVICE WITH BACKSIDE SUPPORT PILLAR STRUCTURES AND METHODS OF FORMING THE SAME
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申请号: US17146866申请日: 2021-01-12
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公开(公告)号: US20220223614A1公开(公告)日: 2022-07-14
- 发明人: Shunsuke TAKUMA , Yuji TOTOKI , Seiji SHIMABUKURO , Tatsuya HINOUE , Kengo KAJIWARA , Akihiro TOBIOKA
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX Addison
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX Addison
- 主分类号: H01L27/11575
- IPC分类号: H01L27/11575 ; H01L23/522 ; H01L23/00 ; H01L27/11556 ; H01L27/11548 ; H01L27/11582
摘要:
At least one vertically alternating sequence of continuous insulating layers and continuous sacrificial material layers is formed over a substrate. Rows of backside support pillar structures are formed through the at least one vertically alternating sequence. Memory stack structures are formed through the at least one vertically alternating sequence. A two-dimensional array of discrete backside trenches is formed through the at least one vertically alternating sequence. Contiguous combinations of a subset of the backside trenches and a subset of the backside support pillar structures divide the at least one vertically alternating sequence into alternating stacks of insulating layers and sacrificial material layers. The sacrificial material layers are replaced with electrically conductive layers while the backside support pillar structures provide structural support to the insulating layers.
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