Invention Publication
- Patent Title: TECHNOLOGIES FOR TRANSISTORS WITH A THIN-FILM FERROELECTRIC
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Application No.: US17958094Application Date: 2022-09-30
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Publication No.: US20240113220A1Publication Date: 2024-04-04
- Inventor: Arnab Sen Gupta , Ian Alexander Young , Dmitri Evgenievich Nikonov , Marko Radosavljevic , Matthew V. Metz , John J. Plombon , Raseong Kim , Uygar E. Avci , Kevin P. O'Brien , Scott B. Clendenning , Jason C. Retasket , Shriram Shivaraman , Dominique A. Adams , Carly Rogan , Punyashloka Debashis , Brandon Holybee , Rachel A. Steinhardt , Sudarat Lee
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/02 ; H01L29/20 ; H01L29/24 ; H01L29/51 ; H01L29/66 ; H01L29/76

Abstract:
Technologies for a transistor with a thin-film ferroelectric gate dielectric are disclosed. In the illustrative embodiment, a transistor has a thin layer of scandium aluminum nitride (ScxAl1-xN) ferroelectric gate dielectric. The channel of the transistor may be, e.g., gallium nitride or molybdenum disulfide. In one embodiment, the ferroelectric polarization changes when voltage is applied and removed from a gate electrode, facilitating switching of the transistor at a lower applied voltage. In another embodiment, the ferroelectric polarization of a gate dielectric of a transistor changes when the voltage is past a positive threshold value or a negative threshold value. Such a transistor can be used as a one-transistor memory cell.
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