Invention Publication
- Patent Title: GLASS SUBSTRATE DEVICE WITH PLATED THROUGH HOLES
-
Application No.: US18089801Application Date: 2022-12-28
-
Publication No.: US20240222257A1Publication Date: 2024-07-04
- Inventor: Bohan Shan , Haobo Chen , Srinivas Venkata Ramanuja Pietambaram , Hongxia Feng , Gang Duan , Xiaoying Guo , Yiqun Bai , Dingying Xu , Bai Nie , Kyle Jordan Arrington , Ziyin Lin , Rahul N. Manepalli , Brandon C. Marin , Jeremy D. Ecton
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L21/48 ; H01L23/538

Abstract:
A substrate for an electronic system includes a glass core layer. The glass core layer includes a first surface and a second surface opposite the first surface; and at least one through-glass via (TGV) extending through the glass core layer from the first surface to the second surface. The TGV includes an opening filled with an electrically conductive material; and a via liner including a sidewall material disposed on a sidewall of the opening between the glass of the glass core layer and the electrically conductive material, wherein the sidewall material includes carbon.
Information query
IPC分类: