发明授权
US5285949A Wire-bonding method, wire-bonding apparatus, and semiconductor device
produced by the wire-bonding method
失效
引线接合方法,引线接合装置和通过引线接合方法制造的半导体器件
- 专利标题: Wire-bonding method, wire-bonding apparatus, and semiconductor device produced by the wire-bonding method
- 专利标题(中): 引线接合方法,引线接合装置和通过引线接合方法制造的半导体器件
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申请号: US907034申请日: 1992-07-01
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公开(公告)号: US5285949A公开(公告)日: 1994-02-15
- 发明人: Susumu Okikawa , Michio Tanimoto
- 申请人: Susumu Okikawa , Michio Tanimoto
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX14035/87 19870126; JPX152839/87 19870619
- 主分类号: B23K20/00
- IPC分类号: B23K20/00 ; B23K20/24 ; H01L21/00 ; H01L21/48 ; H01L21/607 ; H01L23/49 ; B23K31/02
摘要:
The present invention relates to a wire bonding method and a wire bonding apparatus employing a coated wire in which the surface of a metal wire is coated with an insulator, and a semiconductor device produced by the bonding method. The present invention includes forming a mixed gas of (1) a combustible gas and (2) a temperature controlling gas for lowering the combustion temperature of the mixture; and removing the insulator coating material from the coated wire at a bonding part of the coated wire, so as to denude the surface of a metal wire, by the use of flames produced by the combustion of the combustible gas of the mixed gas. The removal of the insulator is executed by an insulator removal torch. Also, the present invention includes forming a metal ball on the front end of a coated wire; joining the metal ball to an external terminal of a semiconductor chip; bringing the rear end of the coated wire into contact with an external lead and destroying the insulator coating where the coated wire contacts the lead; and joining the metal wire at the rear end of the coated wire to the lead. According to the above-stated expedients, the combustion flames, which do not impose any damage or breakdown on the metal wire, can be turned around substantially the whole area of the bonding part of the coated wire, so that the insulator of the coated wire can be readily removed to lessen bonding defects. Moreover, the melting and shrinking insulator of the coated wire is blown away, and insulator globes can be prevented from being formed in the coated wire, so that the bonding defects are avoidable.
公开/授权文献
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