发明授权
- 专利标题: Semiconductor wafer test and burn-in
- 专利标题(中): 半导体晶圆测试和老化
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申请号: US513057申请日: 1995-08-09
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公开(公告)号: US5600257A公开(公告)日: 1997-02-04
- 发明人: James M. Leas , Robert W. Koss , George F. Walker , Charles H. Perry , Jody J. Van Horn
- 申请人: James M. Leas , Robert W. Koss , George F. Walker , Charles H. Perry , Jody J. Van Horn
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: G01R1/06
- IPC分类号: G01R1/06 ; G01R1/073 ; G01R31/28 ; H01L21/66 ; G01R1/02
摘要:
An apparatus and a method for simultaneously testing or burning in all the integrated circuit chips on a product wafer. The apparatus comprises a glass ceramic carrier having test chips and means for connection to pads of a large number of chips on a product wafer. Voltage regulators on the test chips provide an interface between a power supply and power pads on the product chips, at least one voltage regulator for each product chip. The voltage regulators provide a specified Vdd voltage to the product chips, whereby the Vdd voltage is substantially independent of current drawn by the product chips. The voltage regulators or other electronic means limit current to any product chip if it has a short. The voltage regulator circuit may be gated and variable and it may have sensor lines extending to the product chip. The test chips can also provide test functions such as test patterns and registers for storing test results.
公开/授权文献
- US4587444A Variable-threshold-type differential signal receiver 公开/授权日:1986-05-06
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