发明授权
- 专利标题: Method of making contact tip structures
- 专利标题(中): 制造接触尖端结构的方法
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申请号: US839758申请日: 1997-04-15
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公开(公告)号: US5864946A公开(公告)日: 1999-02-02
- 发明人: Benjamin N. Eldridge , Gary W. Grube , Igor Y. Khandros , Gaetan L. Mathieu
- 申请人: Benjamin N. Eldridge , Gary W. Grube , Igor Y. Khandros , Gaetan L. Mathieu
- 申请人地址: CA Livermore
- 专利权人: Form Factor, Inc.
- 当前专利权人: Form Factor, Inc.
- 当前专利权人地址: CA Livermore
- 主分类号: B23K1/00
- IPC分类号: B23K1/00 ; B23K20/00 ; C23C18/16 ; C25D5/08 ; C25D5/22 ; C25D7/12 ; C25D21/02 ; G01R1/04 ; G01R1/067 ; G01R1/073 ; G01R31/28 ; H01L21/00 ; H01L21/48 ; H01L21/56 ; H01L21/60 ; H01L21/603 ; H01L21/66 ; H01L23/48 ; H01L23/485 ; H01L23/49 ; H01L23/498 ; H01L25/065 ; H01L25/16 ; H01R12/00 ; H05K1/14 ; H05K3/20 ; H05K3/30 ; H05K3/32 ; H05K3/34 ; H05K3/36 ; H05K3/40 ; H05K7/10 ; H01R9/00
摘要:
Resilient contact structures are mounted directly to bond pads on semiconductor dies, prior to the dies being singulated (separated) from a semiconductor wafer. This enables the semiconductor dies to be exercised (e.g., tested and/or burned-in) by connecting to the semiconductor dies with a circuit board or the like having a plurality of terminals disposed on a surface thereof. Subsequently, the semiconductor dies may be singulated from the semiconductor wafer, whereupon the same resilient contact structures can be used to effect interconnections between the semiconductor dies and other electronic components (such as wiring substrates, semiconductor packages, etc.). Using the all-metallic composite interconnection elements of the present invention as the resilient contact structures, burn-in can be performed at temperatures of at least 150.degree. C., and can be completed in less than 60 minutes.
公开/授权文献
- US5279675A Method of, and apparatus for, cleaning a tank 公开/授权日:1994-01-18
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