发明授权
- 专利标题： Method and device for measuring thermoelectric characteristics of combinatorial specimen
- 专利标题（中）： 测量组合样品热电特性的方法和装置
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申请号： US10450709申请日： 2002-03-14
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公开(公告)号： US06902317B2公开(公告)日： 2005-06-07
- 发明人: Hideomi Koinuma , Hitoshi Kawaji , Kenji Itaka , Hideki Minami
- 申请人： Hideomi Koinuma , Hitoshi Kawaji , Kenji Itaka , Hideki Minami
- 申请人地址： JP Kawaguchi
- 专利权人： Japan Science and Technology Corporation
- 当前专利权人： Japan Science and Technology Corporation
- 当前专利权人地址： JP Kawaguchi
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权： JP2001-075954 20010316
- 国际申请： PCT/JP02/02415 WO 20020314
- 国际公布： WO02/07529 WO 20020926
- 主分类号： G01N27/04
- IPC分类号： G01N27/04 ; G01K7/02 ; G01N27/00 ; G01N37/00 ; G01R31/26 ; H01L21/66 ; H01L35/34 ; G01N25/00 ; G01K3/00 ; G01N25/20
摘要：
A method and device for measuring thermoelectric characteristics of a combinatorial sample. The method and device are useful for rapid sample evaluation, the investigation of thermoelectric materials, and the carrier control of semiconductors. The device includes combinatorial samples patterned with a metal mask, a pair of sample holders for applying a small temperature gradient to the sample, a thermocouple for measuring the temperature gradient, and a probe pin array in contact with the sample.
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