发明授权
- 专利标题: Method for fabricating a vertical NROM cell
- 专利标题(中): 制造垂直NROM电池的方法
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申请号: US10318551申请日: 2002-12-13
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公开(公告)号: US07005701B2公开(公告)日: 2006-02-28
- 发明人: Ching-Nan Hsiao , Chi-Hui Lin , Chung-Lin Huang , Ying-Cheng Chuang
- 申请人: Ching-Nan Hsiao , Chi-Hui Lin , Chung-Lin Huang , Ying-Cheng Chuang
- 申请人地址: TW Taoyuan
- 专利权人: Nanya Technology Corporation
- 当前专利权人: Nanya Technology Corporation
- 当前专利权人地址: TW Taoyuan
- 代理机构: Quintero Law Office
- 优先权: TW91133597A 20021118
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L39/94 ; H01L31/062 ; H01L31/113 ; H01L31/119
摘要:
A method for fabricating a vertical nitride read-only memory (NROM) cell. A substrate having at least one trench is provided. A spacer is formed over the sidewall of the trench. Subsequently, ion implantation is performed on the substrate using the spacer as a mask to form doping areas as bit lines in the substrate near its surface and the bottom of the trench. Bit line oxides are formed over each of the doping areas. After the spacer is removed, a conformable insulating layer as gate dielectric is deposited on the sidewall of the trench and the surface of the bit line oxide. Finally, a conductive layer as a word line is deposited over the insulating layer and fills in the trench.
公开/授权文献
- US20040094781A1 Method for fabricating a vertical NROM cell 公开/授权日:2004-05-20
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