发明授权
- 专利标题： Field emission source with plural emitters in an opening
- 专利标题（中）： 场地发射源与多个发射器在一个开口
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申请号： US10827813申请日： 2004-04-20
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公开(公告)号： US07112920B2公开(公告)日： 2006-09-26
- 发明人: Makoto Yamamoto , Keisuke Koga , Akinori Shiota , Seigo Kanemaru , Masayoshi Nagao
- 申请人： Makoto Yamamoto , Keisuke Koga , Akinori Shiota , Seigo Kanemaru , Masayoshi Nagao
- 申请人地址： JP Tokyo
- 专利权人： National instutute of advanced industrial science and technology
- 当前专利权人： National instutute of advanced industrial science and technology
- 当前专利权人地址： JP Tokyo
- 代理机构： Hamre, Schumann, Mueller & Larson, P.C.
- 优先权： JP2003-116089 20030421
- 主分类号： H01J63/02
- IPC分类号： H01J63/02 ; H01J1/304 ; H01J1/46
摘要：
A field emission electron source capable of achieving large current density is provided at low cost with good productivity. An insulating layer is formed on a substrate and has one or more openings; and an extraction electrode is formed on the insulating layer. In one or more of the openings, a plurality of emitters, each of which emits an electron by an electric field from the extraction electrode, are formed on the substrate.
公开/授权文献
- US20050001536A1 Field emission electron source 公开/授权日：2005-01-06
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