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1.发明授权Field-emission electron source, method of manufacturing the same, and image display apparatus 失效场发射电子源及其制造方法以及图像显示装置公开(公告)号：US07588475B2
公开(公告)日：2009-09-15
申请号：US11729442
申请日：2007-03-29
IPC分类号： H01J9/00
CPC分类号： H01J1/3044 , H01J9/025 , H01J2201/30407
摘要： A stable field-emission electron source that does not suffer from a current drop even after a high-current density operation for a long time is provided. The field-emission electron source includes: a substrate; an insulating layer that is formed on the substrate and that has a plurality of openings; cathodes arranged at the respective openings in order to emit electron beams; a lead electrode formed on the insulating layer in order to control emission of electrons from the respective cathodes; and a surface-modifying layer formed on the surface of each of the cathodes emitting electrons, comprising a chemical bond between a cathode material composing the cathodes and a material different from the cathode material.
摘要翻译： 提供即使在长时间的大电流密度操作之后也不会受到电流降低的稳定的场致发射电子源。 场发射电子源包括：衬底; 绝缘层，其形成在所述基板上并且具有多个开口; 阴极排列在相应的开口处以便发射电子束; 形成在所述绝缘层上的引线电极，以便控制来自各个阴极的电子的发射; 以及形成在发射电子的每个阴极的表面上的表面改性层，包括构成阴极的阴极材料与不同于阴极材料的材料之间的化学键。
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公开(公告)号：US6163107A
公开(公告)日：2000-12-19
申请号：US37035
申请日：1998-03-09
申请人： Shigeo Itoh , Takahiro Niiyama , Masaharu Tomita , Yoshitaka Kagawa , Akira Inoue , Junji Itoh , Seigo Kanemaru
发明人： Shigeo Itoh , Takahiro Niiyama , Masaharu Tomita , Yoshitaka Kagawa , Akira Inoue , Junji Itoh , Seigo Kanemaru
CPC分类号： H01J3/022 , G09G3/2011 , G09G3/22 , H01J2201/319 , H01J2329/00
摘要： A field emission cathode that can uniform the number of electrons emitted from each emitter and can prevent a line defect even when a gate electrode is electrically short-circuited with an emitter. The movement of electrons in a channel formed on the channel forming electrode is controlled by applying a positive voltage to the current control electrode, so that the current supplied from the cathode electrode to the emitter can be controlled. If the emitter is short-circuited with the gate electrode, the increased current density destroys the channel, so that the current supply to the emitter can be stopped.
摘要翻译： 场发射阴极可以均匀化从每个发射极发射的电子数，并且即使当栅极与发射极电短路时也可以防止线路缺陷。 通过向电流控制电极施加正电压来控制形成在沟道形成电极上的沟道中的电子的移动，从而可以控制从阴极供给到发射极的电流。 如果发射极与栅电极短路，则增加的电流密度会破坏通道，从而可以停止对发射极的电流供应。
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公开(公告)号：US07112920B2
公开(公告)日：2006-09-26
申请号：US10827813
申请日：2004-04-20
CPC分类号： H01J1/3044 , H01J31/127 , H01J2201/30403
摘要： A field emission electron source capable of achieving large current density is provided at low cost with good productivity. An insulating layer is formed on a substrate and has one or more openings; and an extraction electrode is formed on the insulating layer. In one or more of the openings, a plurality of emitters, each of which emits an electron by an electric field from the extraction electrode, are formed on the substrate.
摘要翻译： 以低成本提供能够实现大电流密度的场致发射电子源，生产率高。 绝缘层形成在基板上并具有一个或多个开口; 并且在绝缘层上形成引出电极。 在一个或多个开口中，在基板上形成多个发射体，每个发射体通过来自引出电极的电场发射电子。
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公开(公告)号：US5793154A
公开(公告)日：1998-08-11
申请号：US481068
申请日：1995-06-07
申请人： Shigeo Itoh , Teruo Watanabe , Makoto Miyamori , Norio Nishimura , Junji Itoh , Seigo Kanemaru
发明人： Shigeo Itoh , Teruo Watanabe , Makoto Miyamori , Norio Nishimura , Junji Itoh , Seigo Kanemaru
CPC分类号： H01J21/105 , H01J1/3042 , H01J3/022 , H01J9/025 , H01J2201/30426
摘要： A field emission element including a gate and an emitter and capable of penting any of the element oxide layer from being formed on a tip of the emitter to prevent a decrease in emission current, unstable operation and an increase in noise. The gate has a surface formed of a material of oxygen bonding strength higher than that of a material for at least a tip surface of the emitter, so that oxygen atoms and molecules containing oxygen entering the gate may be captured by adsorption on the gate to prevent formation of any oxide layer on the emitter. When a portion of the emitter other than the tip surface is formed of a material of oxygen bonding strength higher than that of the material for the tip surface, formation of any oxide layer on the tip surface of the emitter is minimized.
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公开(公告)号：US5710478A
公开(公告)日：1998-01-20
申请号：US698260
申请日：1996-08-14
申请人： Seigo Kanemaru , Junji Itoh
发明人： Seigo Kanemaru , Junji Itoh
CPC分类号： H01J3/022 , H01J1/3042 , H01J1/308 , H01J2201/319
摘要： A field emission device of simple structure enables stabilization and control of field emission current. A three-dimensional emitter formed on a base member incorporates therein a source layer on the side in contact with the base member, a drain layer on the side of the distal end including a tip and a channel region layer between the source layer and the drain layer. A gate is formed near the emitter. A strong electric field generated by applying a voltage to the gate causes cold electrons to be emitted from the emitter tip and the voltage applied to the gate also controls the conductivity of the channel region layer, whereby the field emission current emitted from the tip of the emitter is stabilized and controlled.
摘要翻译： 具有简单结构的场致发射器件可实现场发射电流的稳定和控制。 形成在基底构件上的三维发射体在其中包括与基底构件接触的一侧的源极层，在远端侧的漏极层包括尖端和在源极层和漏极之间的沟道区域层 层。 在发射极附近形成栅极。 通过向栅极施加电压产生的强电场使得发射极尖端发出冷电子，并且施加到栅极的电压也控制沟道区域层的导电性，从而从 发射极稳定并受到控制。
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公开(公告)号：US5637023A
公开(公告)日：1997-06-10
申请号：US271676
申请日：1994-07-07
申请人： Shigeo Itoh , Teruo Watanabe , Hisashi Nakata , Norio Nishimura , Junji Itoh , Seigo Kanemaru
发明人： Shigeo Itoh , Teruo Watanabe , Hisashi Nakata , Norio Nishimura , Junji Itoh , Seigo Kanemaru
摘要： A field emission element features an emitter which has rectangular projections at its distal end capable of readily controlling the interval between electrodes in increments as small as sub-microns, in order to reduce the voltage at which the device starts field emission at the required level and to improve emission uniformity. An emitter (2,20), a collector (3,21) and a gate (5,22) are arranged on a substrate (1), which is formed with a recess (4) in proximity to the electrodes (2,3,20,21) other than the gate (5). The gate (5) is provided in the recess (4).
摘要翻译： 场发射元件的特征在于在其远端具有矩形突起的发射极，其能够以小至亚微米的增量容易地控制电极之间的间隔，以便降低器件在所需电平下开始场发射的电压， 以提高排放均匀性。 发射极（2,20），集电极（3,21）和栅极（5,22）布置在衬底（1）上，衬底（1）上形成有靠近电极（2,3）的凹部 ，20,21），而不是门（5）。 门（5）设置在凹部（4）中。
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公开(公告)号：US5381069A
公开(公告)日：1995-01-10
申请号：US159114
申请日：1993-11-30
申请人： Shigeo Itoh , Teruo Watanabe , Hisashi Nakata , Norio Nishimura , Junji Itoh , Seigo Kanemaru
发明人： Shigeo Itoh , Teruo Watanabe , Hisashi Nakata , Norio Nishimura , Junji Itoh , Seigo Kanemaru
摘要： A field emission element in which the emitter has rectangular projections at its distal end capable of readily controlling the interval between electrodes in increments as small as sub-microns, in order to reduce the voltage at which the device starts field emission at the required level and to improve emission uniformity. An emitter (2,20), a collector (3,21) and a gate (5,22) are arranged on a substrate (1), which is formed with a recess (4) in proximity to the electrodes (2,3, 20,21) other than the gate (5). The gate (5) is provided in the recess (4).
摘要翻译： 场致发射元件，其中发射器在其远端具有矩形突起，能够以小到亚微米的增量容易地控制电极之间的间隔，以便降低器件在所需电平下开始场发射的电压，以及 以提高排放均匀性。 发射极（2,20），集电极（3,21）和栅极（5,22）布置在衬底（1）上，衬底（1）上形成有靠近电极（2,3）的凹部 ，20,21），而不是门（5）。 门（5）设置在凹部（4）中。
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8.发明申请Field-emission electron source, method of manufacturing the same, and image display apparatus 失效场发射电子源及其制造方法以及图像显示装置公开(公告)号：US20070184747A1
公开(公告)日：2007-08-09
申请号：US11729442
申请日：2007-03-29
IPC分类号： H01J9/00
CPC分类号： H01J1/3044 , H01J9/025 , H01J2201/30407
摘要： A stable field-emission electron source that does not suffer from a current drop even after a high-current density operation for a long time is provided. The field-emission electron source includes: a substrate; an insulating layer that is formed on the substrate and that has a plurality of openings; cathodes arranged at the respective openings in order to emit electron beams; a lead electrode formed on the insulating layer in order to control emission of electrons from the respective cathodes; and a surface-modifying layer formed on the surface of each of the cathodes emitting electrons, comprising a chemical bond between a cathode material composing the cathodes and a material different from the cathode material.
摘要翻译： 提供即使在长时间的高电流密度操作之后也不会受到电流降低的稳定的场致发射电子源。 场发射电子源包括：衬底; 绝缘层，其形成在所述基板上并且具有多个开口; 阴极排列在相应的开口处以便发射电子束; 形成在所述绝缘层上的引线电极，以便控制来自各个阴极的电子的发射; 以及形成在每个发射电子的阴极的表面上的表面改性层，包括构成阴极的阴极材料和不同于阴极材料的材料之间的化学键。
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9.发明授权公开(公告)号：US07215072B2
公开(公告)日：2007-05-08
申请号：US10806803
申请日：2004-03-23
IPC分类号： H01J1/05
CPC分类号： H01J1/3044 , H01J9/025 , H01J2201/30407
摘要： A stable field-emission electron source that does not suffer from a current drop even after a high-current density operation for a long time is provided. The field-emission electron source includes: a substrate; an insulating layer that is formed on the substrate and that has a plurality of openings; cathodes arranged at the respective openings in order to emit electron beams; a lead electrode formed on the insulating layer in order to control emission of electrons from the respective cathodes; and a surface-modifying layer formed on the surface of each of the cathodes emitting electrons, comprising a chemical bond between a cathode material composing the cathodes and a material different from the cathode material.
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公开(公告)号：US06409565B1
公开(公告)日：2002-06-25
申请号：US09317864
申请日：1999-05-25
申请人： Shigeo Itoh , Junji Itoh , Seigo Kanemaru
发明人： Shigeo Itoh , Junji Itoh , Seigo Kanemaru
IPC分类号： H01J900
CPC分类号： H01J9/025
摘要： A field emission cathode capable of emitting electrons under a low voltage. Lead-out electrodes are formed on an insulating layer and openings are formed at a lamination between the insulating layer and each of the lead-out electrodes. Emitters each are arranged in each of the openings. The insulating layer is provided on a lower surface thereof with a photoresist layer modified by heating. The modified photoresist layer is electrically connected through a resistive layer to a cathode electrode. The cathode electrode is formed in a pattern on a cathode substrate made of glass or the like. The emitters each are constituted by a distal end of each of projections of the modified photoresist layer exposed from the insulating layer. The photoresist is modified by heating, resulting in being provided with electrical conductivity and exhibiting stable electron emitting characteristics under a low voltage.
摘要翻译： 能够在低电压下发射电子的场发射阴极。 引出电极形成在绝缘层上，并且在绝缘层和每个引出电极之间的叠层处形成开口。 发射器各自布置在每个开口中。 绝缘层在其下表面上设置有通过加热改性的光致抗蚀剂层。 改性光致抗蚀剂层通过电阻层电连接到阴极电极。 在由玻璃等制成的阴极基板上形成阴极电极。 发射体各自由从绝缘层露出的改性光致抗蚀剂层的每个突起的远端构成。 通过加热改性光致抗蚀剂，从而提供导电性并在低电压下表现出稳定的电子发射特性。
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