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1.发明授权Field-emission electron source, method of manufacturing the same, and image display apparatus 失效场发射电子源及其制造方法以及图像显示装置公开(公告)号：US07588475B2
公开(公告)日：2009-09-15
申请号：US11729442
申请日：2007-03-29
IPC分类号： H01J9/00
CPC分类号： H01J1/3044 , H01J9/025 , H01J2201/30407
摘要： A stable field-emission electron source that does not suffer from a current drop even after a high-current density operation for a long time is provided. The field-emission electron source includes: a substrate; an insulating layer that is formed on the substrate and that has a plurality of openings; cathodes arranged at the respective openings in order to emit electron beams; a lead electrode formed on the insulating layer in order to control emission of electrons from the respective cathodes; and a surface-modifying layer formed on the surface of each of the cathodes emitting electrons, comprising a chemical bond between a cathode material composing the cathodes and a material different from the cathode material.
摘要翻译： 提供即使在长时间的大电流密度操作之后也不会受到电流降低的稳定的场致发射电子源。 场发射电子源包括：衬底; 绝缘层，其形成在所述基板上并且具有多个开口; 阴极排列在相应的开口处以便发射电子束; 形成在所述绝缘层上的引线电极，以便控制来自各个阴极的电子的发射; 以及形成在发射电子的每个阴极的表面上的表面改性层，包括构成阴极的阴极材料与不同于阴极材料的材料之间的化学键。
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2.发明申请Field-emission electron source, method of manufacturing the same, and image display apparatus 失效场发射电子源及其制造方法以及图像显示装置公开(公告)号：US20070184747A1
公开(公告)日：2007-08-09
申请号：US11729442
申请日：2007-03-29
IPC分类号： H01J9/00
CPC分类号： H01J1/3044 , H01J9/025 , H01J2201/30407
摘要： A stable field-emission electron source that does not suffer from a current drop even after a high-current density operation for a long time is provided. The field-emission electron source includes: a substrate; an insulating layer that is formed on the substrate and that has a plurality of openings; cathodes arranged at the respective openings in order to emit electron beams; a lead electrode formed on the insulating layer in order to control emission of electrons from the respective cathodes; and a surface-modifying layer formed on the surface of each of the cathodes emitting electrons, comprising a chemical bond between a cathode material composing the cathodes and a material different from the cathode material.
摘要翻译： 提供即使在长时间的高电流密度操作之后也不会受到电流降低的稳定的场致发射电子源。 场发射电子源包括：衬底; 绝缘层，其形成在所述基板上并且具有多个开口; 阴极排列在相应的开口处以便发射电子束; 形成在所述绝缘层上的引线电极，以便控制来自各个阴极的电子的发射; 以及形成在每个发射电子的阴极的表面上的表面改性层，包括构成阴极的阴极材料和不同于阴极材料的材料之间的化学键。
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3.发明授权公开(公告)号：US07215072B2
公开(公告)日：2007-05-08
申请号：US10806803
申请日：2004-03-23
IPC分类号： H01J1/05
CPC分类号： H01J1/3044 , H01J9/025 , H01J2201/30407
摘要： A stable field-emission electron source that does not suffer from a current drop even after a high-current density operation for a long time is provided. The field-emission electron source includes: a substrate; an insulating layer that is formed on the substrate and that has a plurality of openings; cathodes arranged at the respective openings in order to emit electron beams; a lead electrode formed on the insulating layer in order to control emission of electrons from the respective cathodes; and a surface-modifying layer formed on the surface of each of the cathodes emitting electrons, comprising a chemical bond between a cathode material composing the cathodes and a material different from the cathode material.
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公开(公告)号：US07112920B2
公开(公告)日：2006-09-26
申请号：US10827813
申请日：2004-04-20
CPC分类号： H01J1/3044 , H01J31/127 , H01J2201/30403
摘要： A field emission electron source capable of achieving large current density is provided at low cost with good productivity. An insulating layer is formed on a substrate and has one or more openings; and an extraction electrode is formed on the insulating layer. In one or more of the openings, a plurality of emitters, each of which emits an electron by an electric field from the extraction electrode, are formed on the substrate.
摘要翻译： 以低成本提供能够实现大电流密度的场致发射电子源，生产率高。 绝缘层形成在基板上并具有一个或多个开口; 并且在绝缘层上形成引出电极。 在一个或多个开口中，在基板上形成多个发射体，每个发射体通过来自引出电极的电场发射电子。
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公开(公告)号：US20050001536A1
公开(公告)日：2005-01-06
申请号：US10827813
申请日：2004-04-20
CPC分类号： H01J1/3044 , H01J31/127 , H01J2201/30403
摘要： A field emission electron source capable of achieving large current density is provided at low cost with good productivity. An insulating layer is formed on a substrate and has one or more openings; and an extraction electrode is formed on the insulating layer. In one or more of the openings, a plurality of emitters, each of which emits an electron by an electric field from the extraction electrode, are formed on the substrate.
摘要翻译： 以低成本提供能够实现大电流密度的场致发射电子源，生产率高。 绝缘层形成在基板上并具有一个或多个开口; 并且在绝缘层上形成引出电极。 在一个或多个开口中，在基板上形成多个发射体，每个发射体通过来自引出电极的电场发射电子。
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公开(公告)号：US6163107A
公开(公告)日：2000-12-19
申请号：US37035
申请日：1998-03-09
申请人： Shigeo Itoh , Takahiro Niiyama , Masaharu Tomita , Yoshitaka Kagawa , Akira Inoue , Junji Itoh , Seigo Kanemaru
发明人： Shigeo Itoh , Takahiro Niiyama , Masaharu Tomita , Yoshitaka Kagawa , Akira Inoue , Junji Itoh , Seigo Kanemaru
CPC分类号： H01J3/022 , G09G3/2011 , G09G3/22 , H01J2201/319 , H01J2329/00
摘要： A field emission cathode that can uniform the number of electrons emitted from each emitter and can prevent a line defect even when a gate electrode is electrically short-circuited with an emitter. The movement of electrons in a channel formed on the channel forming electrode is controlled by applying a positive voltage to the current control electrode, so that the current supplied from the cathode electrode to the emitter can be controlled. If the emitter is short-circuited with the gate electrode, the increased current density destroys the channel, so that the current supply to the emitter can be stopped.
摘要翻译： 场发射阴极可以均匀化从每个发射极发射的电子数，并且即使当栅极与发射极电短路时也可以防止线路缺陷。 通过向电流控制电极施加正电压来控制形成在沟道形成电极上的沟道中的电子的移动，从而可以控制从阴极供给到发射极的电流。 如果发射极与栅电极短路，则增加的电流密度会破坏通道，从而可以停止对发射极的电流供应。
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公开(公告)号：US5847408A
公开(公告)日：1998-12-08
申请号：US824016
申请日：1997-03-21
申请人： Seigo Kanemaru , Junji Itoh
发明人： Seigo Kanemaru , Junji Itoh
CPC分类号： H01J3/022 , H01J2201/319
摘要： A field emission device of simple structure enables stabilization and control of field emission current. Emission current is controlled by a plurality of control voltage systems. An emitter having a sharp tip is fabricated by processing a p-type semiconductor substrate, and an n-type source region is provided on the p-type semiconductor substrate surface at a position that is laterally separated from the emitter. An electrode layer having an aperture facing the apex portion of the emitter is provided on an insulating layer, the electrode layer extending to above the n-type source region. Voltage applied to the electrode layer to apply an extractor field to the apex portion of the emitter and to induce inversion layers at the emitter surface and the surface of the p-type semiconductor substrate. The electrode layer is divided into a plurality of electrodes. An extraction voltage is applied to one of these electrodes closest to the emitter, another electrode is connected to an X selection line and another to a Y selection line, thereby controlling emission current.
摘要翻译： 具有简单结构的场致发射器件可实现场发射电流的稳定和控制。 发射电流由多个控制电压系统控制。 通过处理p型半导体衬底制造具有尖锐尖端的发射极，并且在与发射极横向分离的位置处在p型半导体衬底表面上设置n型源极区。 具有面向发射极顶点的孔的电极层设置在绝缘层上，电极层延伸到n型源极区域的上方。 电压施加到电极层，以将提取器场施加到发射极的顶点，并在p型半导体衬底的发射极表面和表面处诱导反转层。 电极层被分成多个电极。 将提取电压施加到最靠近发射极的这些电极之一，另一个电极连接到X选择线，而另一个电极连接到Y选择线，从而控制发射电流。
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公开(公告)号：US5780318A
公开(公告)日：1998-07-14
申请号：US701866
申请日：1996-08-23
申请人： Takayuki Hirano , Junji Itoh , Seigo Kanemaru
发明人： Takayuki Hirano , Junji Itoh , Seigo Kanemaru
CPC分类号： H01J1/3042 , H01J9/025
摘要： A cold electron emitting device has an emitter base portion, an emitter projection portion and a source region, each of which is an n-type semiconductor, formed on a p-type silicon substrate. A metal film which serves as an extraction electrode and a gate electrode of FET is formed via an insulating layer on the region of the substrate which includes the peripheral regions of the emitter base portion and source region. This cold electron emitting device can be manufactured as follows. First, a conical emitter having an emitter projection portion and emitter base portion and a source region are formed on a p-type semiconductor substrate. Next, an insulating layer and a metal film, which becomes an extraction electrode and a gate electrode of FET, is formed on the substrate which includes peripheral regions of the emitter base portion and source region. Then, an n-type impurity is doped in the emitter and the source region to form an n-type emitter and an n-type source region. In this manner, it is possible to manufacture a cold electron emitting device, which has an excellent work precision for the sharp tip of the emitter projection portion and an excellent uniform structure and can stably emit a current.
摘要翻译： 冷电子发射器件具有形成在p型硅衬底上的发射极基极部分，发射极突出部分和源极区域，每个都是n型半导体。 用作引出电极的金属膜和FET的栅极通过绝缘层在基板的包含发射极基部和源极区的外围区域的区域上形成。 该冷电子发射器件可以如下制造。 首先，在p型半导体基板上形成具有发射极投射部和发射极基部以及源极区的锥形发射体。 接下来，在包括发射极基部和源极区的周边区域的基板上形成作为FET的引出电极和栅电极的绝缘层和金属膜。 然后，在发射极和源极区域中掺杂n型杂质以形成n型发射极和n型源极区。 以这种方式，可以制造对于发射极突起部分的尖锐尖端具有优异的加工精度并且具有优异的均匀结构并且可以稳定地发射电流的冷电子发射器件。
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公开(公告)号：US5469014A
公开(公告)日：1995-11-21
申请号：US829251
申请日：1992-02-03
申请人： Shigeo Itoh , Teruo Watanabe , Makoto Miyamori , Norio Nishimura , Junji Itoh , Seigo Kanemaru
发明人： Shigeo Itoh , Teruo Watanabe , Makoto Miyamori , Norio Nishimura , Junji Itoh , Seigo Kanemaru
CPC分类号： H01J21/105 , H01J1/3042 , H01J3/022 , H01J9/025 , H01J2201/30426
摘要： A field emission element including a gate and an emitter and capable of preventing any of the element oxide layer from being formed on a tip of the emitter to prevent a decrease in emission current, unstable operation and an increase in noise. The gate has a surface formed of a material of oxygen bonding strength higher than that of a material for at least a tip surface of the emitter, so that oxygen atoms and molecules containing oxygen entering the gate may be captured by adsorption on the gate to prevent formation of any oxide layer on the emitter. When a portion of the emitter other than the tip surface is formed of a material of oxygen bonding strength higher than that of the material for the tip surface, formation of any oxide layer on the tip surface of the emitter is minimized.
摘要翻译： 一种场致发射元件，包括栅极和发射极，并且能够防止在发射极的顶端上形成任何元素氧化物层，以防止发射电流降低，操作不稳定和噪声增加。 栅极具有由氧键合强度高于发光体的至少尖端表面的材料的表面形成的表面，从而可以通过栅极上的吸附捕获氧原子和进入栅极的分子，以防止 在发射体上形成任何氧化物层。 当除尖端表面之外的发射体的一部分由氧结合强度高于尖端表面材料的材料形成时，在发射极的顶端表面上形成任何氧化物层都被最小化。
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公开(公告)号：US06409565B1
公开(公告)日：2002-06-25
申请号：US09317864
申请日：1999-05-25
申请人： Shigeo Itoh , Junji Itoh , Seigo Kanemaru
发明人： Shigeo Itoh , Junji Itoh , Seigo Kanemaru
IPC分类号： H01J900
CPC分类号： H01J9/025
摘要： A field emission cathode capable of emitting electrons under a low voltage. Lead-out electrodes are formed on an insulating layer and openings are formed at a lamination between the insulating layer and each of the lead-out electrodes. Emitters each are arranged in each of the openings. The insulating layer is provided on a lower surface thereof with a photoresist layer modified by heating. The modified photoresist layer is electrically connected through a resistive layer to a cathode electrode. The cathode electrode is formed in a pattern on a cathode substrate made of glass or the like. The emitters each are constituted by a distal end of each of projections of the modified photoresist layer exposed from the insulating layer. The photoresist is modified by heating, resulting in being provided with electrical conductivity and exhibiting stable electron emitting characteristics under a low voltage.
摘要翻译： 能够在低电压下发射电子的场发射阴极。 引出电极形成在绝缘层上，并且在绝缘层和每个引出电极之间的叠层处形成开口。 发射器各自布置在每个开口中。 绝缘层在其下表面上设置有通过加热改性的光致抗蚀剂层。 改性光致抗蚀剂层通过电阻层电连接到阴极电极。 在由玻璃等制成的阴极基板上形成阴极电极。 发射体各自由从绝缘层露出的改性光致抗蚀剂层的每个突起的远端构成。 通过加热改性光致抗蚀剂，从而提供导电性并在低电压下表现出稳定的电子发射特性。
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