Invention Grant
- Patent Title: Field emission source with plural emitters in an opening
- Patent Title (中): 场地发射源与多个发射器在一个开口
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Application No.: US10827813Application Date: 2004-04-20
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Publication No.: US07112920B2Publication Date: 2006-09-26
- Inventor: Makoto Yamamoto , Keisuke Koga , Akinori Shiota , Seigo Kanemaru , Masayoshi Nagao
- Applicant: Makoto Yamamoto , Keisuke Koga , Akinori Shiota , Seigo Kanemaru , Masayoshi Nagao
- Applicant Address: JP Tokyo
- Assignee: National instutute of advanced industrial science and technology
- Current Assignee: National instutute of advanced industrial science and technology
- Current Assignee Address: JP Tokyo
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2003-116089 20030421
- Main IPC: H01J63/02
- IPC: H01J63/02 ; H01J1/304 ; H01J1/46
Abstract:
A field emission electron source capable of achieving large current density is provided at low cost with good productivity. An insulating layer is formed on a substrate and has one or more openings; and an extraction electrode is formed on the insulating layer. In one or more of the openings, a plurality of emitters, each of which emits an electron by an electric field from the extraction electrode, are formed on the substrate.
Public/Granted literature
- US20050001536A1 Field emission electron source Public/Granted day:2005-01-06
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