发明授权
US07866341B2 Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
有权
真空泵送系统，其驱动方法，具有该真空泵系统的装置，以及使用其的基板的转移方法
- 专利标题： Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
- 专利标题（中）： 真空泵送系统，其驱动方法，具有该真空泵系统的装置，以及使用其的基板的转移方法
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申请号： US12713136申请日： 2010-02-25
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公开(公告)号： US07866341B2公开(公告)日： 2011-01-11
- 发明人: Hong-Seub Kim , Hyun-Soo Park , Soon-Bin Jung , Sung-Ho Cha , Dong-Jin Kim , Wook-Jung Hwang , Jin-Hyuk Yoo
- 申请人： Hong-Seub Kim , Hyun-Soo Park , Soon-Bin Jung , Sung-Ho Cha , Dong-Jin Kim , Wook-Jung Hwang , Jin-Hyuk Yoo
- 申请人地址： KR Gwangju-si, Gyeonggi-do
- 专利权人： Jusung Engineering Co., Ltd.
- 当前专利权人： Jusung Engineering Co., Ltd.
- 当前专利权人地址： KR Gwangju-si, Gyeonggi-do
- 代理机构： Portland IP Law, LLC
- 优先权： KR2004-0015544 20040308; KR2004-0017627 20040316; KR2004-0017832 20040317; KR2005-0014819 20050223
- 主分类号： H01L21/205
- IPC分类号： H01L21/205
摘要：
An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.