Invention Grant
US08900964B2 Inductors and wiring structures fabricated with limited wiring material
有权
用有限布线材料制成的电感器和布线结构
- Patent Title: Inductors and wiring structures fabricated with limited wiring material
- Patent Title (中): 用有限布线材料制成的电感器和布线结构
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Application No.: US13367895Application Date: 2012-02-07
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Publication No.: US08900964B2Publication Date: 2014-12-02
- Inventor: Hanyi Ding , Jeffrey P. Gambino , Zhong-Xiang He , Alvin J. Joseph , Anthony K. Stamper , Timothy D. Sullivan
- Applicant: Hanyi Ding , Jeffrey P. Gambino , Zhong-Xiang He , Alvin J. Joseph , Anthony K. Stamper , Timothy D. Sullivan
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans LLP
- Agent Anthony J. Canale
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L27/08
Abstract:
Back-end-of-line (BEOL) wiring structures and inductors, methods for fabricating BEOL wiring structures and inductors, and design structures for a BEOL wiring structure or an inductor. A feature, which may be a trench or a wire, is formed that includes a sidewall intersecting a top surface of a dielectric layer. A surface layer is formed on the sidewall of the feature. The surface layer is comprised of a conductor and has a thickness selected to provide a low resistance path for the conduction of a high frequency signal.
Public/Granted literature
- US20130200521A1 INDUCTORS AND WIRING STRUCTURES FABRICATED WITH LIMITED WIRING MATERIAL Public/Granted day:2013-08-08
Information query
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