Invention Grant
- Patent Title: Polishing liquid and polishing method
- Patent Title (中): 抛光液和抛光方法
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Application No.: US13071539Application Date: 2011-03-25
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Publication No.: US08932479B2Publication Date: 2015-01-13
- Inventor: Tetsuya Kamimura
- Applicant: Tetsuya Kamimura
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: SOLARIS Intellectual Property Group, PLLC
- Priority: JP2010-081837 20100331
- Main IPC: C09K13/06
- IPC: C09K13/06 ; C09K3/14 ; H01L21/3105 ; C09G1/02

Abstract:
Provided is a polishing liquid which is used for chemical mechanical polishing of a body to be polished having a layer containing polysilicon or a modified polysilicon, and using which the polishing rate of a layer containing a silicon-based material other than polysilicon is high and polishing of the layer containing polysilicon can be selectively suppressed. The polishing liquid includes components (A), (B), and (C), has a pH of from 1.5 to 7.0, and is capable of selectively polishing a second layer with respect to a first layer: (A) colloidal silica particles having a negative ζ potential; (B) phosphoric acid or an organic phosphonic acid compound represented by the following Formula (1) or (2); and (C) an anionic surfactant having at least one group represented by the following Formulae (I) to (IV): R2—C(R3)3-a—(PO3H2)a Formula (1): R4—N(R5)m—(CH2—PO3H2)n Formula (2): —PO3X2 Formula (I): —OPO3X2 Formula (II): —COOX Formula (III): —SO3X Formula (IV).
Public/Granted literature
- US20110244684A1 POLISHING LIQUID AND POLISHING METHOD Public/Granted day:2011-10-06
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