发明授权
- 专利标题: Method of manufacturing switchable filters
- 专利标题(中): 制造可切换过滤器的方法
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申请号: US13342375申请日: 2012-01-03
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公开(公告)号: US09048809B2公开(公告)日: 2015-06-02
- 发明人: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- 申请人: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Roberts Mlotkowski Safran & Cole, P.C.
- 代理商 Anthony Canale
- 主分类号: H03H3/08
- IPC分类号: H03H3/08 ; H03H9/05 ; H03H9/10 ; H01L41/09 ; H03H9/64
摘要:
Switchable and/or tunable filters and methods of manufacture. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes.
公开/授权文献
- US20130169383A1 SWITCHABLE FILTERS AND DESIGN STRUCTURES 公开/授权日:2013-07-04
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