发明授权
- 专利标题： Ashing apparatus
- 专利标题（中）： 灰化装置
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申请号： US12442834申请日： 2007-12-26
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公开(公告)号： US09059105B2公开(公告)日： 2015-06-16
- 发明人: Masahisa Ueda , Takashi Kurimoto , Michio Ishikawa , Koukou Suu , Toshiya Yogo
- 申请人： Masahisa Ueda , Takashi Kurimoto , Michio Ishikawa , Koukou Suu , Toshiya Yogo
- 申请人地址： JP Kanagawa
- 专利权人： Ulvac, Inc.
- 当前专利权人： Ulvac, Inc.
- 当前专利权人地址： JP Kanagawa
- 代理机构： Christensen Fonder P.A.
- 优先权： JP2007-212409 20070816; JP2007-287340 20071105
- 国际申请： PCT/JP2007/074980 WO 20071226
- 国际公布： WO2009/022440 WO 20090219
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; C23F1/00 ; H01L21/306 ; H01L21/311 ; H01J37/32
摘要：
Disclosed is an ashing apparatus and its method of manufacture wherein decrease in processing efficiency is suppressed. Specifically, a shower plate is arranged to face a substrate stage on which a substrate is placed, and diffuses oxygen radicals supplied into a chamber. A metal blocking plate is arranged between the shower plate and the substrate stage and has a through hole through which oxygen radicals pass. In addition, the metal blocking plate has a first layer, which is made of a metal same as the one exposed in the substrate, on the surface facing the substrate.
公开/授权文献
- US20100089533A1 ASHING APPARATUS 公开/授权日：2010-04-15