公开(公告)号：US09059105B2

公开(公告)日：2015-06-16

申请号：US12442834

申请日：2007-12-26

申请人： Masahisa Ueda ,  Takashi Kurimoto ,  Michio Ishikawa ,  Koukou Suu ,  Toshiya Yogo

发明人： Masahisa Ueda ,  Takashi Kurimoto ,  Michio Ishikawa ,  Koukou Suu ,  Toshiya Yogo

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01L21/311 ,  H01J37/32

CPC分类号： H01L21/31138 ,  H01J37/3244

摘要： Disclosed is an ashing apparatus and its method of manufacture wherein decrease in processing efficiency is suppressed. Specifically, a shower plate is arranged to face a substrate stage on which a substrate is placed, and diffuses oxygen radicals supplied into a chamber. A metal blocking plate is arranged between the shower plate and the substrate stage and has a through hole through which oxygen radicals pass. In addition, the metal blocking plate has a first layer, which is made of a metal same as the one exposed in the substrate, on the surface facing the substrate.

摘要翻译： 公开了一种灰化装置及其制造方法，其中抑制了加工效率的降低。 具体而言，将淋浴板配置成面对放置有基板的基板台，并使供给到室内的氧自由基扩散。 金属阻挡板布置在淋浴板和衬底台之间，并且具有氧自由基通过的通孔。 此外，金属阻挡板具有在与基板相对的表面上由与基板中露出的金属相同的金属制成的第一层。

公开(公告)号：US20100089533A1

公开(公告)日：2010-04-15

申请号：US12442834

申请日：2007-12-26

申请人： Masahisa Ueda ,  Takashi Kurimoto ,  Michio Ishikawa ,  Koukou Suu ,  Toshiya Yogo

发明人： Masahisa Ueda ,  Takashi Kurimoto ,  Michio Ishikawa ,  Koukou Suu ,  Toshiya Yogo

IPC分类号： H01L21/3065

CPC分类号： H01L21/31138 ,  H01J37/3244

摘要： Disclosed is an ashing apparatus wherein decrease in processing efficiency is suppressed. Specifically, a shower plate is arranged to face a substrate stage on which a substrate is placed, and diffuses oxygen radicals supplied into a chamber. A metal blocking plate is arranged between the shower plate and the substrate stage and has a through hole through which oxygen radicals pass. In addition, the metal blocking plate has a first layer, which is made of a metal same as the one exposed in the substrate, on the surface facing the substrate.

摘要翻译： 公开了一种抑制加工效率降低的灰化装置。 具体而言，将淋浴板配置成面对放置有基板的基板台，并使供给到室内的氧自由基扩散。 金属阻挡板布置在淋浴板和衬底台之间，并且具有氧自由基通过的通孔。 此外，金属阻挡板具有在与基板相对的表面上由与基板中露出的金属相同的金属制成的第一层。

公开(公告)号：US20100193131A1

公开(公告)日：2010-08-05

申请号：US12443912

申请日：2008-10-29

申请人： Masahisa Ueda ,  Takashi Kurimoto ,  Kyuzo Nakamura ,  Koukou Suu ,  Toshiya Yogo ,  Kazushige Komatsu ,  Nobusuke Tachibana

发明人： Masahisa Ueda ,  Takashi Kurimoto ,  Kyuzo Nakamura ,  Koukou Suu ,  Toshiya Yogo ,  Kazushige Komatsu ,  Nobusuke Tachibana

IPC分类号： C23F1/08

CPC分类号： H01L21/02068 ,  G03F7/427 ,  H01J37/32192 ,  H01J37/32467 ,  H01J37/32477 ,  H01L21/31138

摘要： An ashing device that prevents the ashing rate from changing over time. The ashing device ashes organic material on a substrate including an exposed metal in a processing chamber. The ashing device includes a path, which is formed in the processing chamber and through which active species supplied to the processing chamber pass. The path is defined by a surface on which the metal scattered from the substrate by the active species is collectible, with the surface being formed so as to expose a metal that is of the same kind.

摘要翻译： 灰化装置可防止灰度随时间变化。 灰化装置在包括处理室中的暴露金属的基板上灰化有机材料。 灰化装置包括形成在处理室中并通过其提供给处理室的活性物质通过的路径。 该路径由其上由活性物质从衬底散射的金属可收集的表面限定，其表面被形成以暴露同一种类的金属。

公开(公告)号：US20060168316A1

公开(公告)日：2006-07-27

申请号：US10524613

申请日：2004-02-02

申请人： Keisuke Kabashima ,  Michihiro Aoki ,  Takashi Kurimoto ,  Takashi Miyamura ,  Masahiro Goshima ,  Nobuaki Matsuura ,  Shigeo Urushidani

发明人： Keisuke Kabashima ,  Michihiro Aoki ,  Takashi Kurimoto ,  Takashi Miyamura ,  Masahiro Goshima ,  Nobuaki Matsuura ,  Shigeo Urushidani

IPC分类号： G06F15/173

CPC分类号： H04L12/4666 ,  H04L12/4675 ,  H04L69/18

摘要： A data transfer apparatus and a data transfer system are provided that can reduce the cost of installing communication equipment compatible with each of several dissimilar communication protocols in one exchange office and can reduce the cost of constructing the network. The data transfer apparatus includes a data reception device (110) that receives packets that comply with dissimilar communication protocols from upstream data transfer apparatuses (51, 52, and 53); a content data extraction device (120) that extracts content data included in the packets; a line selection information storage device (130) that stores the line selection information for selecting communication lines that comply with dissimilar communication protocols; a line selection device (140) that selects the communication line compatible with content data based on the line selection information; and a data transfer device (150) that transfers data to downstream data transfer apparatuses (61, 62, and 63) that are connected to the communication line that has been selected by the line selection device.

摘要翻译： 提供了一种数据传送装置和数据传送系统，其可以降低与一个交换局中的多个不同通信协议中的每一个兼容的通信设备的安装成本，并且可以降低构建网络的成本。 数据传送装置包括从上游数据传送装置（51,52,53）接收符合不同通信协议的分组的数据接收装置（110）。 提取包中包含的内容数据的内容数据提取装置（120） 线选择信息存储装置，存储用于选择符合不同通信协议的通信线路的线路选择信息; 线路选择装置（140），其基于线选择信息选择与内容数据兼容的通信线路; 以及数据传送装置（150），其将数据传送到与由线选择装置选择的通信线路连接的下游数据传送装置（61,62,63）。

公开(公告)号：US07142507B1

公开(公告)日：2006-11-28

申请号：US09510349

申请日：2000-02-22

申请人： Takashi Kurimoto ,  Takashi Shimizu ,  Ikuo Yamasaki

发明人： Takashi Kurimoto ,  Takashi Shimizu ,  Ikuo Yamasaki

IPC分类号： H04L12/54

CPC分类号： H04L47/11 ,  H04L43/00 ,  H04L43/0888 ,  H04L43/0894 ,  H04L43/16

摘要： The purpose of the present invention is to provide a datagram transfer network that can operate stably by avoiding a state of congestion collapse by utilizing information derived from evaluating the impact of datagrams on the operation of the network. To achieve this objective, the results of evaluation is expressed as a preference value related to datagrams, and are inserted in the header in each datagram so that the datagrams are processed by an approach other than the methods based on arrival sequence of datagrams, when derived to the destination indicated in the header. In this approach, datagrams are protocol is controlled by priority order derived from the preference value which reflects traffic information obtained by a traffic monitoring equipment.

摘要翻译： 本发明的目的是提供一种数据报传输网络，其可以通过利用从评估数据报对网络的操作的影响而导出的信息来避免拥塞崩溃的状态来稳定地运行。 为了实现这一目标，评估结果被表示为与数据报相关的偏好值，并被插入到每个数据报的头部中，以便在导出时基于数据报的到达序列的方法来处理数据报 到标头中指示的目的地。 在这种方法中，数据报是通过优先级顺序控制协议的，该优先顺序是反映由交通监控设备获取的交通信息的偏好值。

公开(公告)号：US20060078333A1

公开(公告)日：2006-04-13

申请号：US10531436

申请日：2004-08-18

申请人： Masanori Uga ,  Takashi Kurimoto ,  Michihiro Aoki

发明人： Masanori Uga ,  Takashi Kurimoto ,  Michihiro Aoki

IPC分类号： H04B10/08

CPC分类号： H04L45/00 ,  G11C15/00 ,  H04L45/54 ,  H04L45/7453

摘要： A routing table generating unit that generates a routing table describing a next hop to which a packet is to be sent according to a destination address of the packet that is input via an input channel, including a ternary content addressable memory (TCAM); an external memory; a unit that classifies items in information that is received; and a unit that stores an item that uniquely identifies the information among the classified items in the TCAM and stores the rest of the items to the external memory.

摘要翻译： 路由表生成单元，其根据通过输入信道输入的分组的目的地地址生成描述要发送分组的下一跳的路由表，包括三进制内容可寻址存储器（TCAM）; 外部记忆 对接收到的信息中的项目进行分类的单元; 以及存储在TCAM中的分类项目中唯一地标识信息的项目并将其余的项目存储到外部存储器的单元。

公开(公告)号：US5472564A

公开(公告)日：1995-12-05

申请号：US104546

申请日：1993-08-11

申请人： Moritaka Nakamura ,  Takashi Kurimoto ,  Katsuhiko Iizuka

发明人： Moritaka Nakamura ,  Takashi Kurimoto ,  Katsuhiko Iizuka

IPC分类号： H01L21/28 ,  H01L21/311 ,  H01L21/3213 ,  H01L29/423 ,  H01L21/306

CPC分类号： H01L21/31138 ,  H01L21/28114 ,  H01L21/32137 ,  H01L29/42376

摘要： Plasma etching with hydrogen bromide or bromine as an etching gas allows a precise control in attaining vertical etching or taper etching with a desired taper angle by controlling the temperature of a mass to be etched, which mass is usually a semiconductor wafer.

摘要翻译： 使用溴化氢或溴作为蚀刻气体的等离子体蚀刻允许通过控制要蚀刻的质量的温度来获得具有期望的锥角的垂直蚀刻或锥形蚀刻的精确控制，该质量通常是半导体晶片。

公开(公告)号：US07797444B2

公开(公告)日：2010-09-14

申请号：US10524613

申请日：2004-02-02

申请人： Keisuke Kabashima ,  Michihiro Aoki ,  Takashi Kurimoto ,  Takashi Miyamura ,  Masahiro Goshima ,  Nobuaki Matsuura ,  Shigeo Urushidani

发明人： Keisuke Kabashima ,  Michihiro Aoki ,  Takashi Kurimoto ,  Takashi Miyamura ,  Masahiro Goshima ,  Nobuaki Matsuura ,  Shigeo Urushidani

IPC分类号： G06F15/16

CPC分类号： H04L12/4666 ,  H04L12/4675 ,  H04L69/18

摘要： A data transfer apparatus and a data transfer system are provided that can reduce the cost of installing communication equipment compatible with each of several dissimilar communication protocols in one exchange office and can reduce the cost of constructing the network. The data transfer apparatus includes a data reception device (110) that receives packets that comply with dissimilar communication protocols from upstream data transfer apparatuses (51, 52, and 53); a content data extraction device (120) that extracts content data included in the packets; a line selection information storage device (130) that stores the line selection information for selecting communication lines that comply with dissimilar communication protocols; a line selection device (140) that selects the communication line compatible with content data based on the line selection information; and a data transfer device (150) that transfers data to downstream data transfer apparatuses (61, 62, and 63) that are connected to the communication line that has been selected by the line selection device.

摘要翻译： 提供了一种数据传送装置和数据传送系统，其可以降低与一个交换局中的多个不同通信协议中的每一个兼容的通信设备的安装成本，并且可以降低构建网络的成本。 数据传送装置包括从上游数据传送装置（51,52,53）接收符合不同通信协议的分组的数据接收装置（110）。 提取包中包含的内容数据的内容数据提取装置（120） 线选择信息存储装置，存储用于选择符合不同通信协议的通信线路的线路选择信息; 线路选择装置（140），其基于线选择信息选择与内容数据兼容的通信线路; 以及数据传送装置（150），其将数据传送到与由线选择装置选择的通信线路连接的下游数据传送装置（61,62,63）。

公开(公告)号：US4798650A

公开(公告)日：1989-01-17

申请号：US174348

申请日：1988-03-28

申请人： Moritaka Nakamura ,  Takashi Kurimoto

发明人： Moritaka Nakamura ,  Takashi Kurimoto

IPC分类号： C23F4/00 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/3213 ,  C23F1/02 ,  B44C1/22 ,  C03C15/00 ,  C03C25/06

CPC分类号： H01L21/32136

摘要： A method of reactive ion etching (RIE) of aluminum or an alloy thereof (Al) in which a substrate with an Al layer coated thereon is maintained at a temperature of 60.degree. C. or less by cooling the substrate, so that the Al layer is taperingly etched to form conductor lines having sloped sidewalls. The substrate is clamped to a cooled electrode stage by an electrostatic chuck.

公开(公告)号：US08532087B2

公开(公告)日：2013-09-10

申请号：US10544156

申请日：2004-02-02

申请人： Hisashi Kojima ,  Takashi Kurimoto ,  Ichiro Inoue ,  Tomonori Takeda ,  Takashi Miyamura ,  Keisuke Kabashima ,  Nobuaki Matsuura ,  Michihiro Aoki ,  Shigeo Urushidani

发明人： Hisashi Kojima ,  Takashi Kurimoto ,  Ichiro Inoue ,  Tomonori Takeda ,  Takashi Miyamura ,  Keisuke Kabashima ,  Nobuaki Matsuura ,  Michihiro Aoki ,  Shigeo Urushidani

IPC分类号： H04L12/66

CPC分类号： H04L45/04 ,  H04L45/50 ,  H04L45/52 ,  H04L45/54 ,  H04L45/62 ,  H04Q11/0062 ,  H04Q11/0066 ,  H04Q11/0071 ,  H04Q2011/0088

摘要： An optical network has: sections for establishing optical paths; a plurality of optical edge routers for connecting external IP networks to the optical network (1001); and a plurality of optical cross connects, for connecting the optical edge routers by the optical paths, having switching sections with respect to an optical pulse unit. In the optical network, each of the optical edge routers has both of: (1) an optical network control instance (INSp) for maintaining topology information in the optical network and switching/signaling the optical paths; and (2) an IP network instance (INSi) for maintaining a routing table in each of the external IP networks and activating routing protocols between the external IP networks and the IP network instance. By doing this, it is possible to realize a multi-layer cooperative function and provide highly safe optical networks, etc.

摘要翻译： 光网络具有：用于建立光路的部分; 多个光边缘路由器，用于将外部IP网络连接到光网络（1001）; 以及用于通过光路连接光边缘路由器的多个光交叉连接，具有相对于光脉冲单元的切换部分。 在光网络中，每个光边缘路由器都具有：（1）光网络控制实例（INSP），用于维护光网络中的拓扑信息并切换/发送光路; 和（2）IP网络实例（INSi），用于维护每个外部IP网络中的路由表，并激活外部IP网络和IP网络实例之间的路由协议。 通过这样做，可以实现多层协作功能，提供高度安全的光网络等。